Dr. Steven Gueci Profile

Dr. Steven Gueci

at TEL Technology Ctr America LLC

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Optimization of spin-on metal oxide resist performance via new development techniques on sub-30nm pitch patterning

Lior Huli, Kanzo Kato, Steven Gueci, Nathan Antonovich, Steven Grzeskowiak, David Hetzer, Eric Liu, Alexandra Krawicz, Satoru Shimura, Shinichiro Kawakami, Soichiro Okada, Karen Petrillo, Luciana Meli, Nicholas Latham, Yasiel Cabrera, Belle Antonovich

Proceedings Volume 12498, 1249822 (2023) https://doi.org/10.1117/12.2658880

KEYWORDS: Extreme ultraviolet, Metal oxides, Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Inspection, Interfaces, Etching, Plasma etching, Photoresist processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years