Aiming to develop realistic high-resolution photo images for visual anti-counterfeit media, in this study, we fabricated the world’s smallest level of 8K photo with color pixel composed of metal-insulator-metal (MIM) disk-based structure. In addition, we devised a method of preprocessing photo data in order to express realistic images with structural color pixels.
Nanoimprint lithography (NIL) is one promising candidate for fabricating a patterned media to be used in the next
generation of hard disk drives. It is expected that the pitch, characterizing the feature size of the media will become as
small as about 50 nm for discrete-track recording (DTR) in 2010 or 2011. There are two major issues, one is fine groove
formation and the other is long e-beam writing time. Writing time is estimated more than one week if we use
ZEP520A-resist. To solve these problems, master template fabrication processes using combination of silicon substrate
and new CAR were evaluated. As a result, the capability of 1:2 groove and land ratio 50 nm pitch LS pattern formation
with new CAR which sensitivity is approximately 2.5 times higher than ZEP520A was shown.
Recently, patterned media have gained attention as a possible candidate for use in the next generation of hard disk drives
(HDD). Feature sizes on media are predicted to be 20-25 nm half pitch (hp) for discrete-track media in 2010. One
method of fabricating such a fine pattern is by using a nanoimprint. The imprint mold for the patterned media is created
from a 150-millimeter, rounded, quartz wafer. The purpose of the process introduced here was to construct a quartz
wafer mold and to fabricate line and space (LS) patterns at 24 nmhp for DTM. Additionally, we attempted to achieve a
dense hole (HOLE) pattern at 12.5 nmhp for BPM for use in 2012. The manufacturing process of molds for patterned
media is almost the same as that for semiconductors, with the exception of the dry-etching process. A 150-millimeter
quartz wafer was etched on a special tray made from carving a 6025 substrate, by using the photo-mask tool. We also
optimized the quartz etching conditions. As a result, 24 nmhp LS and HOLE patterns were manufactured on the quartz
wafer. In conclusion, the quartz wafer mold manufacturing process was established. It is suggested that the etching
condition should be further optimized to achieve a higher resolution of HOLE patterns.
Nanoimprint lithography (NIL) is one promising candidate for fabricating a patterned media to be used in the next
generation of hard disk drives. It is expected that the pitch, characterizing the feature size of the media will become as
low as 40-50 nm for Discrete-Track Media (DTM) by 2010 and 25 nm for Bit-Patterned Media (BPM) by 2012. Electron
beam lithography is usually employed for fabricating the nanoimprint mold used for nanoimprint lithography. ZEP520A,
the high-resolution resist that is commonly used for this fabrication has a low throughput; caused by the low sensitivity
when used at the high acceleration voltage of 100 kV. To solve this problem, we evaluated a new high-resolution,
chemically amplified resist (CAR) developed by TOKYO OHKA KOGYO Co., LTD., that was specifically developed
for high resolution, instead of high sensitivity, with over twice the sensitivity of ZEP520A and a resolution of 50 nm
pitch or less. A spot-electron beam (EB) writer with an acceleration voltage of 100 kV (100 kV-SB) was employed and
the new CAR and ZEP520A were compared for resolution and sensitivity. Results indicated that the new CAR patterns
were resolved down to a 48 nm pitch, but were collapsed even at a64 nm pitch. To prevent the collapse, we attempted to
optimize the baking conditions and examined the primers as promoters of the adhesion between the resist patterns and
the substrate surface. As a result, a resist pattern as low as a 48 nm pitch was obtained. We report on the performance of
the new CAR and the fabrication of the Si mold by using the new CAR.
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