Mr. Weifen He Profile

Weifen He

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Proceedings Article | 11 October 2024 Paper

Study on the intelligent valuation technique of step height standards based on atomic force microscopy

Chong Yue, Weifen He, Jun Xiong, Xin Chen, Kun Jiang

Proceedings Volume 13278, 132780U (2024) https://doi.org/10.1117/12.3032361

KEYWORDS: Atomic force microscopy, Standards development, Histograms, Calibration, Metrology, Equipment, Atomic force microscope, Inspection, Semiconductors, Measurement devices

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