Common profilometers cannot be used to measure the complex surfaces with large range. A cantilever profilometer with
large range and high accuracy is presented in this paper. The profilometer is composed of inductive sensors, gratings and
angle measurement structure, which are used to measure surface profile, movement displacement and angle of the
cantilever beam separately. The angle measured by the invariant light-distance structure based on auto-collimation
principle is used to compensate the Abbe error to ensure high measurement accuracy. For counting accurately, a method
of resistance chain subdivision is designed to process the grating interference fringe signal. Experiment results show that
the Abbe error can be compensate through the invariant light-distance structure based on auto-collimation principle. The
designed profilometer can be used to measure complex morphology.
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