Femtosecond laser has been demonstrated to be a prominent tool to manufacture micro scale structure. In the processing, the focusing lens is usually used as the concentrated tool to assemble the original beam to the tiny spot to provide enough energy for ablation. What is more, different focal length means the diverse scale of the focused spot. In common use, various sizes of the spot are required to adjust to the multifarious profiles and substituting the focus lens is the general method. There is no doubt that changing the lens is a fussy job and frequent replacing the lens may cause the lack of stability. In this paper, we report the defocus of the lens to modify the scale of the spot and it is proved to be an effective way to vary the diameter of the focused spot without changing the focus lens.
Periodic systematic error caused by erroneous reference phase adjustments and instabilities of interferometer has a great influence on precision of measurement micro-profile using white light phase-stepping interferometry. This paper presents a five-frame algorithm that is insensitive to periodic systematic error. This algorithm attempts to eliminate the periodic systematic error when calculating the phase. Both theoretical and experimental results show that the proposed algorithm has good immunity to periodic systematic error and is able to accurately recover the 3D profile of a sample.
The non-linearity of the phase shifting mechanism in white light interferometry system can seriously affect the measuring accuracy of the system. In this paper, the correcting method is to combine the displacement feedback control technology with the fuzzy PID control technology. Displacement feedback control mechanism and fuzzy PID controller are designed and then try to figure it out through Matlab simulation and experiment.. The result shows that combining the displacement feedback control technology with the fuzzy PID control technology can fulfill decent overall non-linear correction in the white light interferometry measuring system. Meanwhile, the accuracy of the correction is high and the non-linearity drop from 2% to 0.1%.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.