The pulse compression grating is one of the core components of the chirped pulse amplification system, and its performance determines the performance and lifetime of the entire laser system. Previous studies have shown that the transmission grating is limited to a single material, and the groove depth of the grating is too deep to achieve high diffraction efficiency, making it difficult to fabricate. In this paper, a multilayer dielectric film transmission grating is designed for pulse compression. The grating with 1740 lines/mm and the central wavelength of incident light is 1060 nm. Six layers of dielectric films are added between the grating region and the substrate, with Ta2O5 (n=2.10) and SiO2 (n=1.45) as high and low refractive index materials. The structure of the dielectric film transmission grating is optimized based on the Rigorous Coupled Wave Analysis (RCWA). The results show that when only considering diffraction efficiency, the - 1st order diffraction efficiency at a center wavelength of 1060 nm can reach 99.94% when the grating groove depth is 1.164μm and the duty cycle is 0.324; the -1st order diffraction efficiency in the wavelength range of 1042-1078nm can reach 95%. Through electric field analysis of the grating, an electric field enhancement phenomenon occurs at the grating ridge, with a maximum electric field intensity (normalized |E/E0|) of 1.296. Then, the electric field and diffraction efficiency are optimized, resulting in a grating groove depth of 1.106μm, a duty cycle of 0.446, a -1st order diffraction efficiency of 98.26% at the center wavelength of 1060nm, and a -1st order diffraction efficiency of 95% in the wavelength range of 1038-1086nm. The maximum electric field amplitude is 1.183. The grating after modulation of the electric field increased the bandwidth from 36 nm to 48 nm, the diffraction efficiency decreased by 1.68%, and the maximum value of the electric field amplitude decreased by 8.71%.
The diffraction characteristics of amplitude and phase-type soft-edge apertures with super-Gaussian transmittance at the gap of mosaic grating are investigated in this article. A well-designed soft-edge apertures can effectively suppress the Fresnel straight-edge diffraction intensity distribution at a certain transmission distance and consequently homogenize the overall light intensity on the image plane. We use the PV value, which is the difference between the maximum intensity of Fresnel diffraction and the initial incident intensity, as the evaluation index of diffraction intensity homogenization. Compared with use of the hard-edge aperture, the PV value reduces from 0.6 to 0.009 and 0.051 at the distance of 0.5m and 1m respectively with use of the super-Gaussian amplitude type soft-edge apertures designed by us. While using the super-Gaussian phase type soft-edge apertures designed by us, the PV value reduces from 0.6 to 0.053 and 0.06 at the distance of 0.5m and 1m respectively.
Grating absorption is a phenomenon influenced by various factors such as material properties, grating structure, and characteristics of the incident light. Under intense laser irradiation, the absorbed energy of the laser is converted into thermal energy, resulting in an elevated temperature of both the grating and substrate. This temperature rise significantly compromises the optical performance of the grating, thereby imposing constraints on the advancement of high-power laser systems. The numerical simulations were performed using the finite element method to investigate the effects of different absorptivity of grating, spot sizes, substrate materials (Fused silica, BK7 and Sapphire), and convective coefficients of air on the temperature distribution at various locations on the substrate under high-power laser irradiation (30kW/cm2). Comparative analysis reveals that selecting sapphire as the substrate material under high-power laser irradiation results in better heat dissipation.
Spectral Beam Combination (SBC) technology is an effective way to obtain high power laser beam. Polarization independent multilayer dielectric grating (MLDG) with high damage threshold, high diffraction efficiency is one of the key elements of SBC. In order to effectively combine more laser beams,the wavelength range of grating needs to be broad. To the best of our knowledge, 1480 line/mm is the highest reported line density to date. But its bandwidth is only 35nm. In this paper, we designed broadband polarization independent multilayer dielectric gratings of 1480 lines/mm for spectral beam combination. And the grating is designed to work at the -1 st order Littrow mounting for the central wavelength of 1053nm. Based on the theory of Rigorous Coupled Wave Analysis (RCWA), a multilayer dielectric film grating is established. Ta2O5 (n=2.08) and SiO2 (n=1.46) are used as a high and low refractive index material to form the high reflectivity mirror of (HL)12 H structure. The influence of the number of MLDG groove layers on the bandwidth is mainly analyzed, including single -layer, double-layer, three-layer, four-layer and five-layer. Then, we find that increase the number of groove layers can increase bandwidth of MLDG. And polarization-averaged diffraction efficiency of the grating with five-layer groove was greater than 95% in the wavelength range of 1003 -1083nm (80nm). In addition, the design parameters, tolerance analysis of the grating grooves are described.
In ultra-precision machining, the precision displacement measurement system is required to ensure the positioning accuracy of the tool and the work-piece, and then to ensure the processing accuracy of the product. The grating displacement measurement system which adopt grating pitch as measurement reference not only has big measurement span and high-resolution advantages but also has strong anti-interference ability. So it is widely used in performance testing of surface processing equipment. The traditional two-dimensional grating measuring system realizes two-dimensional measurement by installing two one-dimensional grating measurement devices in two directions of the two-dimensional platform. It’s easy to introduce the abbe error in this way and obviously a lot of space is occupied. While the micro-displacement measurement system based on the two-dimensional grating can not only obtain the micro-displacement data information of two directions at the same time, but also has high measurement accuracy, small abbe error and compact structure. Two-dimensional grating is the core component of the two-dimensional grating measurement system. In this paper, the design two-dimensional grating is carried out. In the case of vertical incidence of the He-Ne laser with 632.8 nm wavelength, we develop the microstructure design of two-dimensional aluminum-plated and gold-plated grating with periods of 1 micron and 2 microns. Based on the rigorous coupled wave theory (RCWA) and Rsoft software, the following simulation results are obtained. Two-dimensional grating with period of 1 micron has higher diffraction efficiency compared with period of 2 microns. When the duty cycle between 0.43-0.58 and the groove depth between 140nm-200nm, the diffraction efficiency of two-dimensional aluminum grating with period of 1 micron is more than 18%. Although the diffraction efficiency of two-dimensional gold grating with period of 1 micron can also achieve 18%, its tolerance range is very small.
The discovery of surface-enhanced Raman scattering (SERS) can enhance the signal of molecules adsorbed on the roughened surface by a million times and o btain high-quality Raman scattering spectra. The ideal SERS substrate has high repeatability, reproducibility and uniformity, so regular hot spots are needed, and the hot spots are the areas with very high electromagnetic fields on the substrate. In this p aper, an one-dimensional grating with silicon substrate, silicon dioxide teeth and silver -plated film is designed. Under the 633nm excited light wavelength, the grating period is 520nm, the duty cycle, silver film thickness and grating tooth height are adjusted to simulate the control variables, and the reflection order spectrum and energy absorption spectrum varying with the variables are calculated. The script of finite -difference time-domain (FDTD) method is written to simulate the electric field maximum spectra of different structures. It is also analyzed that the absorption maximum region and the reflection minimum region are the key points of the maximum field strength. Finally, two rectangular groove gratings are designed as SERS substrates, which can be enhanced by an order of magnitude of 5 orders of magnitude .
Diffraction grating is an important optical device whose surface defects will seriously affect the quality of optical system.In order to achieve the diffraction grating of the ultra precision surface defect inspection, design a set of defects automatic detection system based on machine vision, we use black hat transform images highlight several images, and after a Canny edge detection, expansion, corrosion, determine the connected domain, look for the seed point, the algorithm of region growing process, realize the defect feature extraction, classification and statistics.A two-dimension displacement platform controlled by DSP is designed to realize the panoramic image Mosaic of diffraction grating and accurately locate the coordinates of defects.At the same time, the surface quality of the grating is evaluated according to the American military optical appearance standard MIL-PRF-13830B.
Grating displacement measurement technology has been widely used in the field of position detection technology. In order to accurately measure the linear displacement of an object, a contactless displacement measurement technique is proposed. The single grating displacement sensing structure is adopted, and the interference fringes are collected by the linear array CCD camera driven by FPGA (field programmable gate array). The collected grating fringe signals are denoised, counted and subdivided based on DSP (digital signal processor). In this method, the subsequent circuit is simplified since the subdivision and digitization are completed with image capture by CCD simultaneously and the automatic real-time measurement of the target to be measured is realized. At the same time, the precision of the system is analyzed deeply.
To obtain high efficiency and high bandwidth grating based on large dispersion, we propose a 2-layer transmission grating with a high-line-density in this paper. A unitary fused-silica grating and a 2- layer grating combined with high and low refractive index dielectric material are designed respectively and their performance are compared briefly. The groove density of the grating is 1624 line/mm. By optimizing the grating parameters, the -1st diffraction efficiencies of the 2-layer transmission grating are both greater than 80% for TE and TM polarized incident lights in a wavelength range from 850nm to 1050nm and it can reach an efficiency of more than 97% for both polarizations at a central wavelength of 900nm when the light is incident from the front of grating. Moreover, we found that when the incident mode is in backside incidence mode, i.e. the light is incident from the back of grating, the -1st diffraction efficiency can reach to the maximum value of 97.9%.
Laser beam combining technology currently plays an important role in optical systems. The combined beam grating is the most important realization component inside, so it is necessary to study the beam grating. Conventional metal gratings have high absorbance, and the damage threshold of metal gratings is usually not high. Multilayer dielectric film gratings are necessary for research because they have almost no absorption and high damage thresholds at the same time as high diffraction efficiency. Based on the theory of rigorous coupled wave (RCWA), a multilayer dielectric film grating model is established and a multilayer dielectric film grating with a center wavelength of 1053 nm is designed in the paper After a series of optimal design, the following results are obtained. Ta2O5 and SiO2 are selected as multi-layer material, and the multi-layer structure is S(HL)^12HTA .The groove density is 1480 lines/mm. The profile of grating grooves is rectangular .The duty cycle of surface relief structure is between 0.3-0.4, the groove depth is between 750-850nm, the sum of residual thickness and groove depth is between 930-1030nm.The -1st diffraction average efficiency of the grating is over 95% at the Littrow angle (51.2 degrees).Wavelength bandwidth greater than 40nm.The diffraction efficiency is the same as that of a metal grating .At the same time, the laser induced damage threshold can be improved.
A antireflection film with adjustable refractive index from 1.17 to 1.41 was prepared at room temperature via a template-free sol–gel method, using tetraethylorthosilicate(TEOS) as co-precursor. In this study, the regulation of the refractive index is achieved by mixing different volumes of acid-catalyzed silica sol having a refractive index of 1.41 with a base-catalyzed silica sol having a refractive index of 1.17. The silica coating, with a refractive index of 1.2332, prepared by this base/acid two step catalysis sol-gel process can increase the transmittance of K9 glass by about 3.5%.
Guided mode resonance (GMR) gratings are used as filters due to the narrow bandwidth and high efficiency at the resonance wavelength. In this paper, a two-dimensional gradient-period GMR grating with rectangular array structure is proposed. Ta2O5, HfO2 and SiO2 are selected as grating materials. Double reflection peaks are obtained by matching the guide modes in two orthogonal planes of diffraction to different wavelengths. The rigorous coupled wave analysis (RCWA) are used to analyze the resonance characteristics of two-dimensional GMR grating. By comparing the resonance behavior, the resonance wavelengths of two-dimensional GMR grating can be approximated as the superposition of two one-dimensional GMR gratings, the periods of the two one-dimensional gratings are respectively equal to those of the two-dimensional GMR grating along x and y direction (Λx and Λy). Thus, we can control the two resonance wavelengths by changing the periods of Λx, Λy. According to the result of design, when the two resonance peaks are both in the spectrum range of 850nm-1050nm, the efficiencies of the two peaks are greater than 90%, and full width at half-maximum (FWHM) less than 1.5nm. This two-wavelength tunable filter will be a good two-dimensional displacement sensor. The effects of duty cycle, groove depth and other parameters on the resonance wavelength are also studied.
Crossed-grating, as the standard element for metrology in two-dimensional precision positioning system, has been widely used in precision machine tools, highly sophisticated manufacturing and machining system. The technical indicators of crossed-grating, such as its diffraction efficiency and the efficiency equilibrium of the TE or TM polarized light are relevant to the microstructure of crossed-grating. While the structure of crossed-grating is determined by the microstructure of holographic photoresist grating. For exploring the evolution of microstructure of crossed holographic photoresist grating. In this paper, a new method for obtaining the variation curve of groove depth with exposure volume (the contrast curve of photoresist)is proposed, this method does not need a series of repeated experiments and is easy to operate compared with previous step experiments. The contrast curve of photoresist under different developing conditions (such as developer concentration and developing time) are analyzed. In addition, the top-view groove profile of crossed holographic photoresist grating under different process conditions are revealed too. The above research results provides a theoretical basis for the process parameters in holographic recording and developing of crossed holographic photoresist grating.
Crossed-grating is widely used as the standard element for metrology in two-dimensional precision positioning system. It has many advantages such as high resolution, compact structure, good environmental adaptability and less Abbe error. In this paper, the design of crossed planar reflecting phase grating used under the Littrow condition with circularly polarized light at 780nm wavelength has been carried out. The aim of the design is to find out the range of structure parameters of crossed-grating that has higher -1st order diffraction efficiency and good efficiency equilibrium for both of TE- and TM-polarized incident lights. By adoption of the Fourier modal method (FMM), the microstructure parameters of the 1200lines/mm crossed grating with the duty cycle range of 10% to 50% and the profile depth of 150nm to 350nm have been searched exactly. The calculation results show that: When the duty cycle range of the grating is 42% to 44% and profile depth is 210nm to 220nm, the -1st diffraction efficiencies of TE- and TM-polarized lights are both above 60% and the efficiency equilibrium is better than 80%.
The high diffraction efficiency and high dispersion ability of diffraction grating plays a very important role in laser systems. Fused-silica transmission gratings not only have board band, high diffraction efficiency and high damage threshold, but also have the advantage of light path without shelter comparing to reflective gratings. In this paper, the study of polarization-independent transmission fused-silica grating is carried out, and the influence of rectangular and trapezoidal grating microstructures on the -1st diffraction efficiency of grating is analyzed. For trapezoidal groove structure, in the range of 80 to 90 degrees, the distributions of diffraction efficiency at different bottom angle are calculated and analyzed. The structure parameters of the grating are optimized by rigorous coupled wave theory. The designed grating groove density is 1440 lines/mm. The -1st diffraction efficiency of the grating is over 96% for both of TE and TM polarized waves at the Littrow angle (49.7 degrees) with the center wavelength of 1060nm. Within the bandwidth of 42nm (from 1039 to 1081nm), the -1st diffraction efficiency of the designed grating is theoretically greater than 90% for both of TE and TM polarized waves.
An unpolarized fused silica transmission grating with 1250lp/mm applying in femtosecond laser has been designed at 780nm center wavelength with 740nm~840nm bandwidth. By using the rigorous coupled-wave theory, computer optimization shows that: when the groove depth and duty cycle are about 1.51um~1.63um, 0.53~0.63 respectively, the first-order diffraction efficiency of a lossless-transmission surface-relief grating with a rectangular surface profile can reach to higher than 90% for total unpolarized wave under 28.2°±4°incident angle.
Fused silica transmission grating plays an important role in the ultra-short laser pulse compression system. Fused silica transmission grating have the advantages of high diffraction efficiency, high damage threshold, long life and no shelter. The design and fabrication of pulse compression grating are investigated theoretically and experimentally in this paper. Rigorous coupled wave theory is used for design transmission grating with trapezoidal structure. The trapezoidal structure has better diffraction efficiency than that of the rectangular structure. The deep-etched fused silica transmission grating (1250lp/mm) is fabricated by holographic recording and ion beam etching. The aperture of transmission grating is Φ65mm, and its thickness is 1mm.The absolute -1st diffraction efficiency is about to 98%(@808nm). Experimental results are coincident with the theoretical analysis.
The metal grating has been widely used in the tunable laser to select frequency, the diffraction efficiency and damage threshold of the gratings are very important to the performance of high power tunable laser. However, because of the light absorption of metal material, the damage threshold of the metal grating is usually not high especially at short wavelength, it is hard to meet the requirements of high power laser. This paper presents the laser frequency selection with multilayer dielectric grating, in this method, the high diffraction efficiency is ensured, and the damage threshold of the grating is improved. Based on the rigorous coupled wave (RCWA) theory, the model of multi-layer dielectric film grating is established, and the theoretical design for the 473nm laser is given. After a series of optimal design, the following results are obtained. HfO2 and SiO2 are selected as multi-layer material, and the multi-layer structure is S(HL)^12HTA .The groove density is 3875 lines/mm. The profile of grating grooves is rectangular .The duty cycle of surface relief structure is between 0.31-0.35, the groove depth is between 270-310nm, the sum of residual thickness and groove depth is between 310-320nm.The -1st diffraction efficiency of the grating is over 98% (TE polarization) at the Littrow angle (66.4 degrees).The diffraction efficiency is higher than that of ordinary metal grating. At the same time, the electric field distribution of the grating is optimized, the peak electric field is avoid located at surface relief structure, and the laser induced damage threshold can be improved.
Based on holographic recording technique, a study of the precise control of grating masks has been carried out. The incident light can be heavily absorbed even that photoresist thickness is under the submicron scale. The absorption rate of the photoresist will change greatly along the exposure processing, and it can serious influence the exposure dose of the photosensitive resin in the photoresist. In the old photographic models, it can’t get practical exposure dose distribution in the photoresist. In this paper, a new nonlinear photographic model is proposed, which is based on the absorption rate changing with the exposure dose. The new model can get more accurate exposure dose than that of the old models. The experiment of the developing speed changing with the exposure dose is carried out, and the developing speed variation curve is obtained. The experiment of the absorption rate changing with the exposure dose is also carried out, and the absorption rate variation curve is obtained. The experiment of fabricate holographic grating is also carried out. The dynamic analysis model of the grating mask structure agrees with the experimental results. The new nonlinear photographic model is of great significance to improve the control precision of holographic grating mask.
The stylus profiler is a conventional instrument in surface topography measurement. The interferometric stylus profiler which uses cylindrical phase grating as standard obtains the surface topography information via measuring the changes of phase. In this way, it is apt to realize wider range, higher accuracy and higher resolution simultaneously in topography measurement. Currently, cylindrical phase grating is ordinarily fabricated by means of holographic record. Subject to the present method and technics, the microstructure parameters of the grating, such as spatial frequency, groove depth and duty cycle can hardly been uniform in every area of grating. Concerning the working principle of interferometric stylus profiler with cylindrical phase grating as sensor, the quality of cylindrical hologram phase grating (80mm in radius of curvature, 1200lp/mm in center spatial frequency) is analyzed comprehensively in this paper. Effects of the inconsistency distribution of microstructure parameter of grating over cylinder surface on the phase difference between ±1st order diffraction wave-fronts in different incidence angle are discussed in detail. The theoretical analysis and numerical calculation results show that: the holographic recording parameters determine the distribution of spatial frequency of cylindrical hologram phase grating; the inconsistency of spatial frequency on the cylinder surface is the primary cause affecting measurement accuracy; the inconsistency of duty cycle of grating will have influence on measurement accuracy when the incidence angle is not equal to zero (i.e.in a small incidence angle). Therefore, the process tolerances of cylindrical phase grating are presented and a new fabrication method of high precision cylindrical phase grating is proposed.
A nondestructive, accurate and fast method for measuring the grating parameters of relief gratings is proposed in this paper. At first, the 0th diffractive transmission efficiency spectrum from 600nm to 700nm is obtained according to a certain relief grating model with the rigorous coupled-wave analysis (RCWA). Under the condition of normal incidence, the 0th diffractive transmission efficiency will behave as a function of duty cycles, depths and profiles of grooves for both TE and TM polarization. Then the data of the 0th diffractive transmission efficiency spectrum for TE polarization is regarded as measured values of simulation. Finally, grating parameters are obtained with the library matching method. Theoretical analysis and numerical simulation results demonstrate the feasibility and validity of the proposed method. Being accurate, repeatable and nondestructive, this kind of method will obtain the grating parameters quickly in practice without comprehensive and expensive but only commonly spectrometer that will be convenient for measurement of grating parameters in situ.
KEYWORDS: Diffraction gratings, Diffraction, Gold, Sapphire lasers, Optical design, Holography, System on a chip, Femtosecond phenomena, Photoresist materials, Laser development
Large scale and broadband pulse compression grating which is used in the femtosecond Ti: sapphire laser is studied. The
line density of gold coated pulse compression grating is 1740lp/mm. The working wavelength of gold coated grating is
from 700nm to 900nm and its deviation angle is 16.6 degree(@800nm). By using rigorous coupled wave theory, a series
of calculation results with different profiles of gold coated pulse compression grating, such as rectangular, sinusoid,
semi-sinusoid, are discussed in this paper. In order to get high diffraction efficiency throughout the whole working band,
the duty cycle of grating should be more than 0.5 for the rectangular or semi-sinusoidal profile of groove. Duty cycle of
grating causes the diffraction efficiency to change quickly at the short wavelength. By using holographic recording
method, the gold coated pulse compression gratings with the aperture of 200mm×400mm have been fabricated. The
gratings exhibit -1st order diffraction efficiency in excess of 94%(TM@808nm).
Analytical phase expressions are presented for an Offner stretcher and transmission grating compressor based on ray
tracing and apply them to analyze a chirped-pulse-amplification (CPA) system. Besides, an optimization method to extract
high-fidelity amplified pulse is proposed by controlling the phase of the entire system. Through theoretical analysis and
numerical simulation, one can adjust the incident angle and perpendicular distance between gratings to completely
compensate dispersion of Offner stretcher over entire wavelength. Finally, the optimized CPA system provides
Fourier-transform-limit pulse which is identical with seed pulse.
A novel pulse compression device has been developed for femto-second Ti: sapphire laser at 800nm center wavelength
with 700nm~900nm bandwidth. This new kind of composite pulse compression device consists of two fused silica
transmission gratings with 1250lp/mm and 3300lp/mm respectively and these two fused silica transmission gratings are
located in two optical surfaces of the same fused silica plate. Owing to use anti-reflection transmission gratings with high
space frequency (3300lp/mm), it can avoid the wave-front distort derived from coating antireflection film on one surface
of the fused silica plate. Being made of fused silica, this new composite pulse compression device will be expected to
have high laser damage threshold. The calculation results show that: the -1st order diffraction efficiency of 1250lp/mm
grating is over 87% within the 700nm and 900nm broad-bandwidth for rectangular groove and TE polarization state. And
the average diffraction efficiency within the 700nm and 900nm broad-bandwidth is more than 92%. At 800nm, the -1st
transmitted order diffraction efficiency is great to 96% while the transmittance of 3300lp/mm grating is up to 99.9%.
KEYWORDS: Diffraction gratings, Polymers, Polarization, Polymer thin films, Near field, Diffraction, Holography, Integrated optics, Near field optics, Ion beams
Blazed grating is a key diffractive optical element in spectrometer. Different from the traditional holographic ion beam etching method, blazed grating has been fabricated on a novel polymer with cyclic-azobenzene pendants (Pcyclic-azoMMA) by all optical fabrication with two steps in this paper. Firstly, use two interfering Kr+ laser beams with the most efficient RCP+LCP polarization to inscribe symmetric surface relief gratings on polymer film. After that, make a single laser beam with polarization perpendicular to the grating grooves irradiate slantly to induce blazed asymmetric structure. The distribution of the near field of the grating while single linearly polarized beam irradiate slantly at different angles was simulated. The calculation demonstrates that -1st order diffraction efficiency of blazed gratings is similar to that of triangle blazed grating.
A micro-spectrometer which adopts the holographic concave grating as imaging and dispersing element is introduced in
the paper. Using ZEMAX soft ware tools, the optimal design of aberration correction of the concave grating which
retains the image quality without sacrificing the resolution is coming up with. The portable micro-spectrometer with F/#4
is developed. During 350nm to 800nm wavelength range, the resolution of this kind of micro-spectrometer is better than
0.5nm. In addition, the diffraction efficiency of the concave grating, which is a very important indicator of the
spectrometer and confines the detecting ability to the faintest spectrograph, is calculated by means of the rigorous
coupled wave theory of the grating. The relationship between the diffraction efficiency of the concave grating and its
profile parameters is discussed, too. The results obtained from these researches provide the necessary guidance in
fabrication of the micro-spectrometer.
The pulse compressed grating (i.e. PCG) is the key optical element in high power laser system. In order to obtain the
PCG with high diffraction efficiency, it is necessary to design the required structure parameters of the photo-resist
grating which is used as the mask of fabricating the PCG in process of etching. The rigorous couple wave theory is
adopted to study and search for the suitable structure parameters of the PCG with the 1740lp/mm space frequency and
particular basement of dielectric stack films which could produce more than 97% diffraction efficiency. Then the
required structure parameters of the mask which is corresponding to those suitable structure parameters of the PCG are
determined under some etching technological conditions. In studying the relationship between the diffraction efficiency
of the mask and its structure parameters, we found that we could estimate the structure parameters of the mask by its -1st
order diffraction efficiency. Then a simple and practical method which can estimate the structure parameters of the
photo-resist grating according to its diffraction efficiency is proposed. The measuring setup based on this method is built
and the veracity of this method is verified by experiment. The experiment result is present in the paper.
In process of fabricating the pulse compression grating (PCG), before the photoresist grating's profile is etched into the
substrate with multilayer dielectric stack, the profile parameters, i.e. the groove depth, residual thickness and duty cycle
which directly affect the diffraction efficiency of the PCG are required to be measured. A non-destructive detecting
method to determine the profile parameters which is based on analyzing the 0th order diffracted spectrum of the
photoresist grating is present in this paper. An optimization function of variable profile parameters is defined in this
method. By means of the direct search algorithm approach, the profile parameters are derived from the spectrum of the
0th order diffracted light for the 1740lp/mm photo-resist grating with definite dielectric stack and the Littrow incidence
angle. Numerical simulation results show that: when the value of optimization function is set under 1%, the difference of
the groove depth and the difference of duty cycle between the deduced value and the target value are less than 10nm and
2% respectively. The 0th order diffraction spectrum from 400nm to 700nm is obtained by the spectrometer. Then the
profile parameters of the photo-resist grating are deduced from the measuring spectrum. The deducted result is compared
with the result provided by the SEM. It shows that the spectrum deductive method is an effective method in determining
the depth and duty cycle of photoresist grating with multilayer dielectric stack. At the end of the paper, the factors
affecting the precision of deducing are discussed, too.
In terminal optical system of the ICF (inertial confinement fusion) , the large caliber (310mm*310mm) beam sampling
grating (BSG) is used to confirm the energy of the main laser by measuring the -1st transmission diffractive light
intensity of the main laser beam.The characteristics of BSG's energy response directly affects the measurement
accuracy. The characteristic of BSG's energy response has been studied in this paper based on the actual intensity
distribution of the ultra-high energy laser beam and the spatial distribution model of diffractive efficiency of BSG.
BSG's energy response affected by its uniformity of the diffractive efficiency has been analysised, too. The results
indicate that the spatial distribution of diffractive efficiency of BSG is directly related to the energe response
characteristics and the uniformity of BSG's diffractive efficiency has an impact on the accuracy of the sampling of
energy.This research provides a theoretical basis for evaluating the high-energy sampling device's energy response
characteristic in ultra-high energy diagnosis. The technical indicator with the uniformity of BSG's diffractive efficiency
has been attained and these results are use for the fabrication of the beam sampling gratings in practice.
To alleviate the difficulty of ion beam etching, it is essential to acquire the low gradient holographic photoresist grating
masks as well as the high gradient ones (i.e. the rectangular holographic photoresist grating masks). According to the ion
beam etching experiments, the low gradient photoresist grating masks can effectively eliminate the redeposition. The
control of the profile of holographic photoresist grating masks is investigated in this paper. Considering the effects of
developing time and temperature of the developer on the response of photoresist and adopting the combination of
computer simulation and experiments, a low gradient photoresist grating mask: 30% duty cycle at bottom and 65°
gradient can be fabricated. The study indicates the increase of the developing time causes the diminish of the threshold
volume of exposure while the increase of the slope of the linearity of photoresist response; the rise of the temperature of
the developer leads to both the increase of the threshold volume of exposure and the slope of the linearity of photoresist
response. As a result non-1:1 interferential exposure and low-temperature development are required in the fabrication of
low gradient photoresist grating masks. The 1:7 interferential exposure and 15°C- development have been adopted in this
experiment.
The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated. The RCW (rigorous coupled-wave) method was adopted to theoretically analyze the influence, which is caused by the gratings profile and multilayer dielectric stack, on the diffraction efficiency. Researches on detecting principle and methods of the multilayer dielectric gratings were also tried to be carried out here. The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile, basing on the theoretical research and the calculating results by the RCW method. Detecting experiments have been conducted to compare the theoretical analyses; the results of this comparison may be helpful to instruct the detection of the gratings profile.
Diffractive composite spatial code is a novel concealed optical code. It use diffractive micro-gratings matrix as carrier of diffractive composite spatial code. When diffractive micro-gratings matrix is lighted with monochromatic plane wave, diffractive composite spatial code appears. With the aid of specific recognizer, meanings which diffractive composite spatial code represents will be read out. Coding principle and design ofdiffractive composite spatial code are introduced in details in this paper. Detecting technology of this code is explored, too. The analyzing indicates that the method of recognizing of diffractive composite spatial code is unsophisticated and feasible. These characteristics are very important and useful in security of document, bond and even web.
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