A procedure is developed to modify silicon surface by organic monolayer films with designed micrometer patterns of different chemical functionalities, which is based on the photolithography and photoactivated reaction of alkenes with Si-H on the hydrogen-terminated silicon surface. Subsequent chemical modification of the micro-pattern can be devised. As an illustration, DNA probe arrays are formed with the spatial resolution limited only by the current photolithography technology. The hybridization of the patterned probes with complementary targets is demonstrated through fluorescence detection. This method is applicable to high throughput biochips.
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