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Yabin Zhou
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Publications (1)
Proceedings Article | 27 February 2023 Paper
Real-time warpage deformation monitoring using distributed optical fiber sensing
Shun Liu, Pingyu Zhu, Zhecong Lin, Yabin Zhou, Marcelo A. Soto
Proceedings Volume 12585, 1258506 (2023) https://doi.org/10.1117/12.2668453
KEYWORDS: Deformation, Silicon, Optical sensing, Optical fibers, Spatial resolution, Manufacturing, Fiber optics sensors, Ultraviolet radiation, Semiconducting wafers, Glues
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