Dr. Young-sun Choi Profile

Dr. Young-sun Choi

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 2 October 2024 Presentation

A novel integrated microsphere-assisted hyperspectral metrology and autofocus method for semiconductor devices

Soonyang Kwon, Jangryul Park, Young-sun Choi, Kwangrak Kim, Youngjun Lee, Jiwoong Kim, Taeyong Jo, Myungjun Lee

Proceedings Volume PC13130, PC1313008 (2024) https://doi.org/10.1117/12.3025804

KEYWORDS: Time metrology, Semiconductors, Metrology, Microspheres, Imaging systems, Hyperspectral imaging, Super resolution, Reflection, Distance measurement, 3D metrology

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