We are developing fabrication methods of a volume binary (VB) grating, trapezoid grating and reflector facet transmission (RFT) grating. The VB grating can achieve a larger angular dispersion and higher diffraction efficiency than conventional surface-relief transmission gratings with step shaped grooves, it can be achieved a wider spectral bandwidth than a volume phase holographic (VPH) grating whose refractive index is sinusoidally modulated. The trapezoid grating can bring the spectral characteristics of s- and p-polarization closer to each other than a VB grating, so it can further improve the peak diffraction efficiency.
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