In shape processing of the ultra-thin mirror, deformation will be produced under cutting forces, which is a major cause of quality deterioration. An ultra-thin mirror with diameter-thickness ratio more than 10 is studied in this paper. Rigidity characteristic of the grinding process by diamond wheel is analyzed by FEM. A receptance model of the micro-cutting process and the surface accuracy is established by a self-adaptive multi-scale method according the first strength method. And the effectiveness of the mathematical model is verified by experience. And the dynamic stiffness caused by grinding is optimized. As a result, deformation of the optical surface is reduced to 0.004λ and the acceptable surface accuracy can be achieved.
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