Dr. Zhenjiang Xing Profile

Dr. Zhenjiang Xing

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Proceedings Article | 10 December 2024 Paper

Development of a synchrotron-based EUV microscope for actinic mask inspection

Shuying Deng, Jinjiang Fu, Zhenjiang Xing, Kunyang Li, Zhou Zhou

Proceedings Volume 13423, 134231F (2024) https://doi.org/10.1117/12.3053151

KEYWORDS: Zone plates, Extreme ultraviolet, Microscopes, Light sources and illumination, Mirrors, Imaging systems, Design, Lithography, Inspection, Objectives, EUV optics, Actinic inspection, Defect inspection, Inspection equipment

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