Dr. Antonio Fernandez Mato Profile

Dr. Antonio Fernandez Mato

at Univ of Manchester

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Publications (1)

SPIE Journal Paper | 2 June 2022

Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography

Scott Lewis, Hayden Alty, Michaela Vockenhuber, Guy DeRose, Antonio Fernandez Mato, Dimitrios Kazazis, Paul Winpenny, Richard Grindell, Grigore Timco, Axel Scherer, Yasin Ekinci, Richard E. Winpenny

JM3, Vol. 21, Issue 04, 041404, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041404

KEYWORDS: Extreme ultraviolet lithography, Selenium, Electron beam lithography, Monte Carlo methods, Metals, Mercury, Molecules, Chemical species, Photomicroscopy, Absorption

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