A systematic study of secondary electron collaborative the radio-frequency (RF) inductively coupled plasma (ICP) surface modification of PET film and its surface physical and chemical changes were analyzed. It was found that with a secondary electron collaborative the RF plasma, the contact angle was reduced to 17 ° in 5 seconds and RMS roughness is enhanced by 7 times higher than that of only plasma treatment film. The atomic force microscopy (AFM) and X-ray photo electron spectroscopy (XPS) were employed to investigate the surface characteristics with the collaborative plasma treatments. The amount of oxygen-containing polar functional groups was also elevated with the plasma treatment. Both the enhancements of surface roughness and oxygen-containing functional groups explain the improvements of hydrophilicity and cohesiveness achieved on PET film by the collaborative plasma.
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