Yasuhiro Hidaka
Principal engineer at KLA Corporation
SPIE Involvement:
Author
Area of Expertise:
Optical metrology , Level sensor in lithography scanner , Overlay measurement , Spectroscopic ellipsometry , Interferometric range detection , Image processing
Publications (2)

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734
KEYWORDS: Holograms, Ellipsometry, Overlay metrology, Polarization, Critical dimension metrology, Metrology, Image sensors, Reflectivity, Objectives, Semiconducting wafers

Proceedings Article | 15 March 2021 Presentation + Paper
Proceedings Volume 11611, 116111J (2021) https://doi.org/10.1117/12.2581555

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top