During the course of super smooth surface processing, grinding procedure is a very important link, for one thing the subsurface damage induced by cutting can be removed, for another its quality determines the subsurface damage depth of the mirror which influences some important index such as strength, stability, coating quality and so on. Therefore, the accurate measurement of subsurface damage depth is the prerequisite to ensure the removal amount in the subsequent processing and make sure that the subsurface damage is removed completely. In this paper, based on fused silica mirror as the experimental object, free abrasives of W28 size are used to grind the mirror blank, then two destructive measurement methods are adopted respectively. The result shows that, comparing with angle polishing method, differential chemical etching method could describe the subsurface damage depth accurately.
Due the annular polishing technology for planar optical components do not have the sharp selectivity, annular polishing technology is a very import process to fabricate irregular planar elements which with high precision surface shape and low surface roughness. According to the characteristics of annular polishing, the zns asymmetric plane window annular polishing process and key technical parameters control was researched. In this paper, one pair of asymmetric planar ZnS window parts were machined which diagonal length is 147mm, through technology experiments, obtained process test samples. The surface figures of the plane zns window are measured by a Zygo interferometer and the reflect wavefront P-V value is better than 1.5λ, the reflect wavefront local error rms value is better than 0.05λ (λ=632.8nm). Experiments results demonstrate the effectiveness of annular processing technology was used to manufacture zinc sulfide asymmetric shape plane window.
As a practical engineering device, laser gyro has replaced other types of gyro and become the dominant product of inertial navigation devices, and the mirror substrate is the key part for successful development of laser gyro. Normally, the mirror must have a high reflectivity, for example 99.99% or more, but the premise is that the super smooth surface with the order of Å must be fabricated first 1. In the process of super smooth surface, grinding procedure is a very important step; its quality determines the subsurface damage depth of the mirror. In this paper, based on optical quartz glass as the study object, three different size abrasives are used to grind the blank respectively; then the particle size distribution, surface roughness and microstructure are tested; finally, angle polishing method to measure subsurface damage depth is adopted. Some reasonable theory parameters are obtained through analysis of the test data, also having certain significance for practice.
Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.