Laser chemical processing of layered films and etching of semiconductors

Costas P. Grigoropoulos; Yoonsoo Rho; Matthew Eliceiri; Runxuan Li

doi:10.1117/12.3004187

13 March 2024 Laser chemical processing of layered films and etching of semiconductors

Costas P. Grigoropoulos, Yoonsoo Rho, Matthew Eliceiri, Runxuan Li

Proceedings Volume PC12874, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024; PC1287402 (2024) https://doi.org/10.1117/12.3004187
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

This presentation summarizes recent work at the Laser Thermal Laboratory on the laser-aided processing and functionalization of two-dimensional (2D) layered materials and the laser chemical processing of semiconductors.

Conference Presentation

Citation Download Citation

Costas P. Grigoropoulos, Yoonsoo Rho, Matthew Eliceiri, and Runxuan Li "Laser chemical processing of layered films and etching of semiconductors", Proc. SPIE PC12874, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024, PC1287402 (13 March 2024); https://doi.org/10.1117/12.3004187

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