Excimer laser processing of diamond-like films

Vladimir G. Ageev; T. N. Glushko; V. F. Dorfman; A. V. Kuzmichov; B. N. Pypkin

doi:10.1117/12.46956

1 September 1991 Excimer laser processing of diamond-like films

Vladimir G. Ageev, T. N. Glushko, V. F. Dorfman, A. V. Kuzmichov, B. N. Pypkin

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46956
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

Basic regimes of the KrF-laser-assisted patterning of a-C:H and of W-alloyed a-C/Si/O:H diamond-like films (DLF) of dielectrical and metal-like varieties are studied. Laser-induced processes of the film graphitization and ablation under the multipulsed irradiation are considered. The submicron resolution of the film structurization is shown to be possible by using the ablative projection UV laser lithography.

Citation Download Citation

Vladimir G. Ageev, T. N. Glushko, V. F. Dorfman, A. V. Kuzmichov, and B. N. Pypkin "Excimer laser processing of diamond-like films", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46956

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available