Laser processing of YBCO superconducting thin films

Rumen I. Tomov; Valery S. Serbezov; Peter A. Atanasov

doi:10.1117/12.204986

31 March 1995 Laser processing of YBCO superconducting thin films

Rumen I. Tomov, Valery S. Serbezov, Peter A. Atanasov

Proceedings Volume 2502, Gas Flow and Chemical Lasers: Tenth International Symposium; (1995) https://doi.org/10.1117/12.204986
Event: Gas Flow and Chemical Lasers: Tenth International Symposium, 1994, Friedrichshafen, Germany

Abstract

Superconducting Y₁Ba₂Cu₃O₇ thin films were prepared by in-situ oxygen plasma-assisted XeCl excimer laser deposition. A multistep superfast CO₂ laser annealing was investigated as a method of modification of the Y₁Ba₂Cu₃O₇ thin films on Si. It was revealed that cw CO₂ laser heating of substrate surface may be also a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO₃ and YSZ(111) were successfully experimented for preparation of good superconducting thin films. It is shown that N₂ laser ablation may be a proper technique for patterning Y₁Ba₂Cu₃O₇ thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.

Citation Download Citation

Rumen I. Tomov, Valery S. Serbezov, and Peter A. Atanasov "Laser processing of YBCO superconducting thin films", Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); https://doi.org/10.1117/12.204986

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