Laser fabrication of three-dimensional microstructures, cavities, and columns

Bing Shen; Ricardo Izquierdo; Michel Meunier

doi:10.1117/12.167546

1 February 1994 Laser fabrication of three-dimensional microstructures, cavities, and columns

Bing Shen, Ricardo Izquierdo, Michel Meunier

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167546
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

A laser processing system is developed for laser microfabrication and micromachining of 3-D microstructures. We show the feasibility of laser induced chlorine etching of silicon under SiO₂ and Si₃N₄ membranes for the formation of underlying cavities and tunnels. Deposition of tungsten and silicon columns on SiO_xN_y/Si substrates is also demonstrated.

Citation Download Citation

Bing Shen, Ricardo Izquierdo, and Michel Meunier "Laser fabrication of three-dimensional microstructures, cavities, and columns", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167546

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