Effect of the pLDD implantation dose on pMOS transistor characteristics

Eitan N. Shauly; Richard M. Fastow; Yigal Komem; Itzhak Edrei

doi:10.1117/12.250890

13 September 1996 Effect of the pLDD implantation dose on pMOS transistor characteristics

Eitan N. Shauly, Richard M. Fastow, Yigal Komem, Itzhak Edrei

Proceedings Volume 2875, Microelectronic Device and Multilevel Interconnection Technology II; (1996) https://doi.org/10.1117/12.250890
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

pMOS transistors having lightly doped drain (pLDD) structures were fabricated with varying channel lengths and pLDD implantation doses. The effect of the implantation dose on the saturation current, peak substrate current, effective channel length, and threshold voltage was studied. It was found that above a critical pLDD dose (approximately 5 X 10¹² B/cm²) the effective channel length was reduced, resulting in an increase in the saturation current and a decrease in the threshold voltage. The peak substrate current, however, decreased with the pLDD implantation does up until a value of 5 X 10¹³ B/cm². An empirical relationship between the saturation current and the peak substrate current for transistors of varying channel lengths was derived, and is given as: Ibp equals 1.068 +/- 0.15 * Idp^{2.232+/- 0.12}.

Citation Download Citation

Eitan N. Shauly, Richard M. Fastow, Yigal Komem, and Itzhak Edrei "Effect of the pLDD implantation dose on pMOS transistor characteristics", Proc. SPIE 2875, Microelectronic Device and Multilevel Interconnection Technology II, (13 September 1996); https://doi.org/10.1117/12.250890

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available