Nanoscale Si3N4 tuning fork cavity optomechanical sensors with high fmQm product

Rui Zhang; Yundong Ren; Kartik Srinivasan; Vladimir Aksyuk; Marcelo Davanço; Yuxiang Liu

doi:10.1117/12.2239197

16 September 2016 Nanoscale Si₃N₄ tuning fork cavity optomechanical sensors with high f_mQ_m product

Rui Zhang, Yundong Ren, Kartik Srinivasan, Vladimir Aksyuk, Marcelo Davanço, Yuxiang Liu

Proceedings Volume 9922, Optical Trapping and Optical Micromanipulation XIII; 99222X (2016) https://doi.org/10.1117/12.2239197
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

There exists a tradeoff between the mechanical resonant frequency (f_m) and the mechanical quality factor (Q_m) of a nanomechanical transducer, which resulted in a tradeoff between the band width and sensitivity. Here, we present monolithic silicon nitride (Si₃N₄) cavity optomechanical transducer, in which high f_m and Q_m are achieved simultaneously. A nanoscale tuning fork mechanical resonator is near-field coupled with a microdisk optical resonator, allowing the displacement of mechanical resonator to be optically read out. Compared with a single beam with same length, width, and thickness, the tuning fork simultaneously increases f_m and Q_m by up to 1.4 and 12 times, respectively. A design enabled, on-chip stress tuning method is also demonstrated. By engineering the clamp design, we increased the stress in the tuning fork by 3 times that of the Si₃N₄ film. A fundamental mechanical in-plane squeezing mode with f_m ≈ 29 MHz and Q_m ≈ 2.2×10⁵ is experimentally achieved in a high-stress tuning fork device, corresponding to a f_mQ_m product of 6.35×10¹² Hz. The tuning fork cavity optomechanical sensors may find applications where both temporal resolution and sensitivity are important such as atomic force microscopy.

Citation Download Citation

Rui Zhang, Yundong Ren, Kartik Srinivasan, Vladimir Aksyuk, Marcelo Davanço, and Yuxiang Liu "Nanoscale Si₃N₄ tuning fork cavity optomechanical sensors with high f_mQ_m product", Proc. SPIE 9922, Optical Trapping and Optical Micromanipulation XIII, 99222X (16 September 2016); https://doi.org/10.1117/12.2239197

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