IR ellipsometric studies of Ti and Mo surfaces modified by high-dose ion irradiation

Leonid V. Poperenko; M. V. Vinnichenko; V. D. Karpusha; Arnulf Roeseler

doi:10.1117/12.497263

1 April 2003 IR ellipsometric studies of Ti and Mo surfaces modified by high-dose ion irradiation

Leonid V. Poperenko, M. V. Vinnichenko, V. D. Karpusha, Arnulf Roeseler

Proceedings Volume 5024, Selected Papers on Optics and Photonics: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (2003) https://doi.org/10.1117/12.497263
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 2003, 2003, Moscow, Russian Federation

Abstract

The effects of high-dose metal ion implantation on optical properties of metal mirrors have been analyzed by means of the IR Fourier transform spectral ellipsometry in the wavelength range 2 - 25 micrometer. The samples of polycrystalline Ti and Mo after the treatment by mixed ion beam of Ti⁺ and C⁺ were studied. In effective medium approximation the optical constants n and k as well as a complex dielectric function were calculated and their spectral dependencies for implanted surfaces were studied in comparison with non implanted. Optical properties changes were more essential for bombarded Ti surfaces than for Mo. Modification of Ti by the ions leads to entirely different from the Drude-like behavior of the complex dielectric function while in case of Mo it remains Drude-like. These changes could be associated with more significant disordering effects in case of Ti surfaces treatment by Ti⁺ and C⁺ ions than in case of Mo implantation by the same ions.

Citation Download Citation

Leonid V. Poperenko, M. V. Vinnichenko, V. D. Karpusha, and Arnulf Roeseler "IR ellipsometric studies of Ti and Mo surfaces modified by high-dose ion irradiation", Proc. SPIE 5024, Selected Papers on Optics and Photonics: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (1 April 2003); https://doi.org/10.1117/12.497263

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