Application of metal-organic chemical vapor deposition to vertical-cavity surface-emitting lasers

Eric A. Armour; Shang Zhu Sun; David P. Kopchik; Kang Zheng; Ping Zhou; Julian Cheng; Christian F. Schaus

doi:10.1117/12.59171

26 June 1992 Application of metal-organic chemical vapor deposition to vertical-cavity surface-emitting lasers

Eric A. Armour, Shang Zhu Sun, David P. Kopchik, Kang Zheng, Ping Zhou, Julian Cheng, Christian F. Schaus

Proceedings Volume 1634, Laser Diode Technology and Applications IV; (1992) https://doi.org/10.1117/12.59171
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

We have successfully used low-pressure metal-organic chemical vapor deposition (LP-MOCVD) to grow GaAs/A1GaAs vertical-cavity surface-emitting lasers containing graded-index distributed Bragg reflector (DBR) mirrors. The continuously-graded mirror heterojunctions were obtained by maintaining a constant growth temperature while ramping the reactant gas flows. Graded interfaces were found to reduce the energy-band discontinuities, resulting in improved electrical charteristics. A 35 p.m diameter device has a series resistance of 22 , a CW output power of 2 mW, a threshold current density of 1.2 kA/cm₂, an overall power efficiency of 3.0%, and a turn-on voltage of 2.3 V.

Citation Download Citation

Eric A. Armour, Shang Zhu Sun, David P. Kopchik, Kang Zheng, Ping Zhou, Julian Cheng, and Christian F. Schaus "Application of metal-organic chemical vapor deposition to vertical-cavity surface-emitting lasers", Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); https://doi.org/10.1117/12.59171

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