Dr. Philip D. Henshaw
Div. Manager at Parsons Corp
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 25 October 2006 Paper
Proceedings Volume 6378, 637814 (2006) https://doi.org/10.1117/12.684756
KEYWORDS: Detection and tracking algorithms, Sensors, Luminescence, Algorithm development, Aerosols, Particles, Ultraviolet radiation, LIDAR, Signal detection, Atmospheric particles

Proceedings Article | 17 October 2006 Paper
Pierre Trepagnier, Robert Dillon, Philip Henshaw, David McCampbell
Proceedings Volume 6377, 637708 (2006) https://doi.org/10.1117/12.684754
KEYWORDS: Luminescence, Sensors, Aerosols, Principal component analysis, Statistical analysis, Spectroscopy, Atmospheric particles, Voltage controlled current source, Optical analysis, Optical fibers

Proceedings Article | 26 June 2003 Paper
Philip Henshaw, Pierre Trepagnier, Robert Dillon, Wouter Pril, Bas Hultermans
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485475
KEYWORDS: Interferometers, Semiconducting wafers, Turbulence, Sensors, Overlay metrology, Ultraviolet radiation, Receivers, Wafer testing, Beam splitters, Pulsed laser operation

Proceedings Article | 7 July 1997 Paper
Philip Henshaw, Donald DeGloria, Sandra Kelly, Robert Dillon
Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276047
KEYWORDS: Turbulence, Interferometers, Control systems, Semiconducting wafers, Lithography

Proceedings Article | 7 June 1996 Paper
Proceedings Volume 2726, (1996) https://doi.org/10.1117/12.240942
KEYWORDS: Interferometers, Turbulence, Phase shift keying, Mirrors, Phase measurement, Semiconducting wafers, Beam splitters, Sensors, Signal detection, Overlay metrology

Showing 5 of 18 publications
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