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Jie Chen
at Tongji Univ
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Author
Publications (3)
Proceedings Article | 15 September 2016 Presentation + Paper
Fabrication and characterization of one-dimensional multilayer gratings for nanoscale microscope calibration
Xingrui Wang, Yang Zhao, Jie Liu, Jie Chen, Tongbao Li, Xinbin Cheng
Proceedings Volume 9927, 99270M (2016) https://doi.org/10.1117/12.2236866
KEYWORDS: Multilayers, Microscopes, Calibration, Etching, Silicon, Polishing, Transmission electron microscopy, Image processing, Adhesives, Silica
Proceedings Article | 15 September 2016 Presentation + Paper
Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition
Jie Liu, Xinbin Cheng, Jie Chen, Xingrui Wang, Xiao Deng, Yan Ma, Tongbao Li
Proceedings Volume 9927, 99270K (2016) https://doi.org/10.1117/12.2235906
KEYWORDS: Metrology, Chromium, Atomic force microscopy, Calibration, Chemical species, Laser stabilization, Scanning electron microscopy, Standards development, Manufacturing, Atomic force microscope
Proceedings Article | 24 September 2015 Paper
Replication and subdivision of chromium nano-grating in atom lithography
Xiao Deng, Jie Chen, Jie Liu, Yan Ma, Xinbin Cheng, Tongbao Li
Proceedings Volume 9628, 96281O (2015) https://doi.org/10.1117/12.2191128
KEYWORDS: Chromium, Atomic force microscopy, Chemical species, Lithography, Nanolithography, Nanostructures, Metrology, Nanofabrication, Standards development, Image analysis
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