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The majority of chipmakers are putting light source data generated by tools such as Cymer OnLine (COL), OnPulse Plus, and SmartPulse to good use. These data sets, combined with in-depth knowledge of the equipment, makes it possible to draw powerful conclusions that help increase both chip manufacturing consistency as well as equipment productivity. This discussion will focus on the latter, equipment availability, and how data analysis can help increase equipment availability for Cymer customers. There are several types of opportunities for increasing equipment availability, but in general we can focus on two primary categories: 1) scheduled downtime and 2) unscheduled downtime. For equipment that is under control of a larger entity, as the laser is to the scanner, there are additional categories related to either communication errors or better synchronization of events that can maximize overall litho-cell efficiency. In this article we will focus on general availability without highlighting the specific cause of litho-cell (laser, scanner and track). The goal is to increase equipment available time with a primary focus is on opportunities to minimize errors and variabilities. |
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Light sources
Error analysis
Molybdenum
3D scanning
Laser scanners
Neodymium
Scanners
