Mr. Alan C. L. Chen Profile

Alan C. L. Chen

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Publications (2)

Proceedings Article | 26 November 2024 Presentation + Paper

New applications on multi-beam mask writers to enable mask-making in 3nm and beyond

Ta Wei Ou, Wing Kwan Ho, Tung San Lai, Jeremy L. Lu, Alan C. Chen, Alexander Egl, Matthias Kühmayer, Florian Brenner

Proceedings Volume 13216, 132160F (2024) https://doi.org/10.1117/12.3034678

KEYWORDS: Mask making, Thermal effects, Matrices, Machine learning, Design, Beam controllers, Advanced patterning

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Proceedings Article | 26 August 2024 Paper

Actinic inspection improvement and application in high volume manufacturing for N3 node and beyond

Hao-Ming Chang, Hsin-Fu Tseng, C.H. Lu, S.C. Hsu, Yu-Ting Chen, Wei-Chung Hu, Ajay Nandoriya, Yi-An Huang, Yung-Sheng Chang, C.W. Wen, C.L. Chen, Frankie F. Tsai, Keisuke Noguchi, Hiroki Miyai, Masayasu Nishizawa, Atsushi Tajima, Hirokazu Seki

Proceedings Volume 13177, 131770Q (2024) https://doi.org/10.1117/12.3032058

KEYWORDS: Extreme ultraviolet, Inspection, Tin, Actinic inspection, Pellicles, Deep ultraviolet, High volume manufacturing, Deep learning, Manufacturing, Liquids

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