Dr. Daniel Brown Profile

Dr. Daniel Brown

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Publications (3)

Proceedings Article | 28 April 2023 Presentation + Paper

EUV light source for high-NA and low-NA lithography

Karl Umstadter, Matthew Graham, Michael Purvis, Alex Schafgans, Jayson Stewart, Peter Mayer, Daniel Brown

Proceedings Volume 12494, 124940Z (2023) https://doi.org/10.1117/12.2657772

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, High volume manufacturing, Plasma, Light sources, Gas lasers, Scanners, Tin, EUV optics

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Proceedings Article | 22 February 2021 Poster + Presentation

Advances toward high power EUV sources for EUVL scanners for HVM in the next decade and beyond

David Brandt, Michael Purvis, Igor Fomenkov, Daniel Brown, Alex Schafgans, Peter Mayer, Rob Rafac

Proceedings Volume 11609, 116091E (2021) https://doi.org/10.1117/12.2584413

KEYWORDS: Extreme ultraviolet lithography, Scanners, Extreme ultraviolet, Tin, Semiconductors, Laser stabilization, Laser applications, High volume manufacturing

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Proceedings Article | 22 February 2021 Presentation

Laser produced plasma EUV sources for N5 HVM and beyond: performance, availability and technology innovation

Peter Mayer, David Brandt, Igor Fomenkov, Michael Purvis, Daniel Brown

Proceedings Volume 11609, 1160918 (2021) https://doi.org/10.1117/12.2584407

KEYWORDS: Scanners, Extreme ultraviolet lithography, Tin, Extreme ultraviolet, Semiconductors, High volume manufacturing

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