Dr. Fabrizio Siviero Profile

Dr. Fabrizio Siviero

at SAES Getters SpA

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 31 May 2012 Paper

Lifetime prediction in vacuum packaged MEMS provided with integrated getter film

Fabrizio Siviero, Antonio Bonucci, Andrea Conte, Marco Moraja, Olivier Gigan, Isabelle Thomas

Proceedings Volume 8353, 83533C (2012) https://doi.org/10.1117/12.920566

KEYWORDS: Microelectromechanical systems, Methane, Gases, Instrument modeling, Microbolometers, Sensors, Carbon monoxide, Thin film devices, Thin films, Metals

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years