Dr. Marco Moraja Profile

Dr. Marco Moraja

Business Area Manager at SAES Getters SpA

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 31 May 2012 Paper

Lifetime prediction in vacuum packaged MEMS provided with integrated getter film

Fabrizio Siviero, Antonio Bonucci, Andrea Conte, Marco Moraja, Olivier Gigan, Isabelle Thomas

Proceedings Volume 8353, 83533C (2012) https://doi.org/10.1117/12.920566

KEYWORDS: Microelectromechanical systems, Methane, Gases, Instrument modeling, Microbolometers, Sensors, Carbon monoxide, Thin film devices, Thin films, Metals

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SPIE Journal Paper | 1 July 2008

New approach of fabrication and dispensing of micromachined cesium vapor cell

Lukasz Nieradko, Christophe Gorecki, Adel Douahi, Vincent Giordano, Jean-Charles Beugnot, Jan Dziuban, Marco Moraja

JM3, Vol. 7, Issue 03, 033013, (July 2008) https://doi.org/10.1117/12.10.1117/1.2964288

KEYWORDS: Cesium, Absorption, Silicon, Glasses, Atomic clocks, Semiconducting wafers, Etching, Modulation, Microelectromechanical systems, Chemical species

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Proceedings Article | 14 February 2008 Paper

A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS

A. Bonucci, S. Guadagnuolo, A. Caterino, A. Conte, M. Moraja

Proceedings Volume 6884, 68840M (2008) https://doi.org/10.1117/12.761140

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Molecules, Wafer bonding, Gases, Reliability, Argon, Testing and analysis, Carbon monoxide

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Proceedings Article | 6 January 2006 Paper

High and stable Q-factor in resonant MEMS with getter film

A. Conte, M. Moraja, G. Longoni, A. Fourrier

Proceedings Volume 6111, 61110N (2006) https://doi.org/10.1117/12.647710

KEYWORDS: Sensors, Microelectromechanical systems, Semiconducting wafers, Gases, Thin films, Silicon, Packaging, Infrared sensors, Carbon monoxide, Sensor performance

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Proceedings Article | 23 December 2003 Paper

Chemical treatment of getter films on wafers prior to vacuum packaging

Marco Moraja, Marco Amiotti, Heather Florence

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.525099

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Silicon, Wafer bonding, Packaging, Glasses, Particles, Industrial chemicals, Carbon monoxide, Silicon films

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Proceedings Article | 16 January 2003 Paper

New getter configuration at wafer level for assuring long-term stability of MEMS

Marco Moraja, Marco Amiotti, Richard Kullberg

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472718

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Carbon monoxide, Zirconium, Glasses, Ceramics, Reliability, Scanning electron microscopy, Particles

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Showing 5 of 6 publications

Conference Committee Involvement (1)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

23 January 2007 | San Jose, California, United States

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