Ms. Manlin Han Profile

Manlin Han

at Univ of Shanghai for Science and Technology

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Author

Publications (5)

Proceedings Article | 27 November 2023 Paper

Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

Yuhang Shen, Ying Yang, Sen Han, Xueyuan Li, Linghua Zhang, Chenxi Gong, Jingming Gou, Wujun Lv, Manlin Han, Quanzhao Wang, Bo Zhang, Jincheng Zhuang

Proceedings Volume 12769, 127690H (2023) https://doi.org/10.1117/12.2687259

KEYWORDS: Fizeau interferometers, Phase shifts, Optical testing, Astronomical interferometers, Optics manufacturing, Optical surfaces, Laser development, Astronomical imaging, Tolerancing, Spectral density

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Proceedings Article | 27 November 2023 Paper

Spectral analysis algorithm of vibration effect in phase-shifting interferometry

Wujun Lv, Ying Yang, Linghua Zhang, Yuhang Shen, Manlin Han, Jingming Guo, Chenxi Gong, Sen Han

Proceedings Volume 12769, 127690P (2023) https://doi.org/10.1117/12.2687344

KEYWORDS: Vibration, Phase interferometry, Phase measurement, Signal intensity, Phase shifts, Fizeau interferometers, Vibration simulation, Error analysis, Distortion, Interferograms

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Proceedings Article | 27 November 2023 Paper

Analysis of vibration causes of large aperture wafer under vertical support

Ying Yang, Yuhang Shen, Wujun Lv, Linghua Zhang, Sen Han, Manlin Han, Jingming Guo, Chenxi Gong

Proceedings Volume 12769, 127690N (2023) https://doi.org/10.1117/12.2686769

KEYWORDS: Semiconducting wafers, Vibration, Environmental sensing, Turbulence, Wafer inspection, Laboratories, Thermal stability, Interferometry

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Proceedings Article | 27 November 2023 Poster + Paper

Multi-wavelength laser interferometer control system design

Chenxi Gong, Yuhang Shen, Sen Han, Jingming Guo, Ying Yang, Wujun Lv, Yuhang Li, Linghua Zhang, Manlin Han

Proceedings Volume 12769, 127691A (2023) https://doi.org/10.1117/12.2686984

KEYWORDS: Fizeau interferometers, Wavefronts, Control systems design, Control systems, Switching, Optical transmission, Equipment, Wavefront errors, Visualization, Signal detection

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Proceedings Article | 27 November 2023 Poster + Paper

Analysis of defocus error on the absolute measurement of spherical surface

Jingming Guo, Sen Han, Linghua Zhang, Yuhang Shen, Wujun Lv, Ying Yang, Chenxi Gong, Yuhang Li, Manlin Han

Proceedings Volume 12769, 1276916 (2023) https://doi.org/10.1117/12.2686758

KEYWORDS: Error analysis, Spherical lenses, Fizeau interferometers, Equipment, Optical metrology, Optical interferometry, Inspection, Confocal microscopy, Zemax, Optical surfaces

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