The simulated grating for absolute measuring the transfer function of large-aperture Fizeau interferometer is proposed, combining with the surface and homogeneity absolute measurement data, the simulated grating absolute surface data without aberration can be obtained more accurately to achieve the full aperture transfer function absolute measurement at all spatial frequency. A 300mm aperture Fizeau interferometer experimental results show that the absolute surface errors of the three flats are less than λ/20(PV) and λ/100(RMS), and the homogeneity measurement is better than 1*10-6. The optimized transfer function is better than 0.86 at 1 mm-1 spatial frequency, which is a 10% improvement.
A dual-beam Fizeau interferometry with both small and large aperture two measurement modes is proposed. The two modes of the interferometer were measured and analyzed using three-flat four-step absolute measurement and three-flat simulated sinusoidal phase grating. An integrated 4″-18″ aperture dual-beam Fizeau interferometer was used to perform experiments on large and small aperture by the above two measurement methods. The experimental results show that the absolute surface errors of the three flats are less than λ/20(PV) and λ/100(RMS), and the transfer function is better than 0.78 at the 1 mm-1 spatial frequency, which satisfies the specification.
Wafer, the primary material used to make semiconductor chips, are found in almost every type of electronic device used in everyday life. As the quality of wafer used in large-scale integrated circuits has improved considerably, the diameter of wafer has continued to increase, and the thickness of silicon wafer has become increasingly thin. Wafer manufacturers and device manufacturers are increasingly focusing on wafer thickness variation. In the past few years, the usual capacitive tools for wafer inspection have been replaced by interferometric tools for higher sensitivity and resolution. We, therefore, describe a method that uses two Fizeau-type phase-shift interferometers to simultaneously measure the front and back surfaces of a vertically placed wafer and calculate the thickness variation of the wafer based on the resulting morphologies. The reliability of the method was verified by comparing the wafer thickness variation obtained from experimental measurements with that obtained from optical glass bonding. Over three days, five consecutive measurements were performed daily on 50mm wafer using this method, and the experimental results showed that the average values of RMS (Root Mean Square) of the thickness variation calculated for each day were 41.843nm, 40.751nm, and 40.490nm, and the average values of PV (Peak to Veally) were and 206.761nm, 205.252nm, and 209.800nm, and the measurements proved to be highly reproducible. The method has good stability and reliability to meet the measurement of wafer thickness variation.
KEYWORDS: Interferometry, Control systems design, Calibration, Interferometers, Control systems, Switching, Switches, Interfaces, Microsoft Foundation Class Library, Channel projecting optics
The traditional interferometry method of large aperture optical elements relies on changing the beam expansion lens and optical path structure artificially according to different test samples, which inevitably introduces some systematic errors. Therefore, this paper proposes a corresponding dual-wire control scheme according to the functional requirements and simulation experiments of dual-optical path interferometer. This scheme is based on serial communication protocol and Zigbee communication protocol. Through the coordination of Zigbee wireless control, serial software control and mechanical structure, the optical path can be folded and calibrated for many times, so that the changing position of the optical element after each switch of measurement aperture is fixed. The real-time status is displayed in the interactive interface developed based on MFC (Microsoft Foundation Classes). Finally, the whole system is tested and verified. The results show that the system can basically complete the real-time debugging of the optical path, which provides a practical design idea for the automatic control of the hybrid interferometer in the future.
Testing wavefront distortions at the design wavelength is critical for optical system qualification. The wavefront aberrations is usually expressed in the Zernike polynomials form. As the available wavelength of the laser is limited, wavefronts of an optical system at only a few wavelengths can be test precisely. We consider the change in wavefront with wavelength is caused by the change in the refractive index of the optical material. In this paper we put forward a method for calibrating transmitted wavefront at any wavelength within certain limits. Transmitted wavefronts can be estimated at any wavelength utilizing the relationship between transmitted wavefront and wavelength. We study the relationship between transmitted wavefront Zernike coefficients and wavelength, and choose the Conrady formula to express the function of Zernike coefficients and wavelengths. Zernike coefficients at any wavelength in a certain range can be calculated by the Conrady formula at three other wavelengths. The transmitted wavefront at a specific wavelength can be fitted. Finally, we verify different kinds of optical systems by this method. The result shows the method is effective for the monochromatic system and the achromatic system, while the apochromatism system is form with special glass. The relationship between of the transmitted wavefront Zernike coefficients and wavelength is more complex.
Digital interferometer is widely used for evaluating optical surfaces due to its outstanding sub-nanometer accuracy and precision. In this paper, we will summarize its advantages and then describe its applications in industry, especially in both absolute flat and cylindrical surface and measurements. Inner surfaces measurement of cylindrical ring can be achieved without map stitching, by a Fizeau interferometer with a 90° conical mirror. The alignment of this arrangement, however, is very crucial to the accomplishment. Any small misplacement of 90° cone or hollow cylinder from their ideal settings may result in large measurement errors. These errors are not intuitive and hard to be removed if their origins are not well understood. In other words, it is very important to know how these measurement errors are generated from the optical misalignment in order to eliminate them. Transmission flat has normally 1/20 wavelength PV. However, when a flat surface under test is better or much better than the transmission flat, we need the absolute flat measurement. We developed a new method to be easily able to achieve the accuracy of 1/100 wavelength PV. We have dedicated our efforts to do so. The theoretical analysis, computer simulations, and experimental validation are presented in the paper.
We developed a new application on Microsoft Foundation Classes (MFC) to identify correct
transmission spheres (TS) for Spherical Surface Testing (SST). Spherical surfaces are important optical
surfaces, and the wide application and high production rate of spherical surfaces necessitates an accurate
and highly reliable measuring device. A Fizeau Interferometer is an appropriate tool for SST due to its subnanometer
accuracy. It measures the contour of a spherical surface using a common path, which is
insensitive to the surrounding circumstances. The Fizeau Interferometer transmits a wide laser beam,
creating interference fringes from re-converging light from the transmission sphere and the test surface. To
make a successful measurement, the application calculates and determines the appropriate transmission
sphere for the test surface. There are 3 main inputs from the test surfaces that are utilized to determine the
optimal sizes and F-numbers of the transmission spheres: (1) the curvatures (concave or convex), (2) the
Radii of Curvature (ROC), and (3) the aperture sizes. The application will firstly calculate the F-numbers
(i.e. ROC divided by aperture) of the test surface, secondly determine the correct aperture size of a convex
surface, thirdly verify that the ROC of the test surface must be shorter than the reference surface’s ROC of
the transmission sphere, and lastly calculate the percentage of area that the test surface will be measured.
However, the amount of interferometers and transmission spheres should be optimized when measuring
large spherical surfaces to avoid requiring a large amount of interferometers and transmission spheres for
each test surface. Current measuring practices involve tedious and potentially inaccurate calculations. This
smart application eliminates human calculation errors, optimizes the selection of transmission spheres
(including the least number required) and interferometer sizes, and increases efficiency.
Higher accuracy of optical surface measurement is needed with the rapid development of optical industry and technology, especially in the field of optical manufacture and optical metrology. Fizeau interferometery is widely recognized as one of the most important measurement techniques currently in use. Results of the Fizeau interferometeric testing contain the reference surface errors and test surface errors. The test accuracy is restricted by the error of reference surface. As a result, so-called absolute flatness testing technology must be used to eliminate the system error such as reference surface error and higher accuracy of the surface profile testing. In this paper, the theory formula of even and odd functions is deduced, and the method are programmed for simulation. Based on HOOL phase-shifting interferometer, experiments are done to achieve high accuracy flatness measurement. The experiment shows that with high-accuracy interferometer, absolute flatness testing technology can effectively calibrate reference surface and improve the accuracy of flatness surface testing. An important result of this experiment is that the accuracy of the test surface can be reached λ/50.
In the experiment of researching the nanometer laser interferometer, our design of laser interferometer circuit system is up to the wireless communication technique of the 802.15.4 IEEE standard, and we use the RF TI provided by Basic to receive the data on speed control system software. The system’s hardware is connected with control module and the DC motor. However, in the experiment, we found that single chip microcomputer control module is very difficult to drive the DC motor directly. The reason is that the DC motor's starting and braking current is larger than the causing current of the single chip microcomputer control module. In order to solve this problem, we add a driving module that control board can transmit PWM wave signal through I/O port to drive the DC motor, the driving circuit board can come true the function of the DC motor’s positive and reversal rotation and speed adjustment. In many various driving module, the L298N module’s integrated level is higher compared with other driver module. The L298N model is easy to control, it not only can control the DC motor, but also achieve motor speed control by modulating PWM wave that the control panel output. It also has the over-current protection function, when the motor lock, the L298N model can protect circuit and motor. So we use the driver module based on L298N to drive the DC motor. It is concluded that the L298N driver circuit module plays a very important role in the process of driving the DC motor in the DC motor speed control system.
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