Mr. Haruki Saito Profile

Haruki Saito

at Nikon Corp.

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Absolute coordinate system adjustment and calibration by using standalone alignment metrology system

Satoshi Ando, Haruki Saito, Sayuri Tanaka, Tetsuya Kawata, Takanobu Okamoto, Katsushi Makino, Yuji Shiba, Takehisa Yahiro, Jun Ishikawa, Masahiro Morita

Proceedings Volume 11611, 116112S (2021) https://doi.org/10.1117/12.2583695

KEYWORDS: Optical alignment, Metrology, Lithography, Calibration, Distortion, Semiconducting wafers, Overlay metrology, Scanners

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Proceedings Article | 20 March 2020 Paper

High-order field distortion correction using standalone alignment technology with modeling and sampling optimization

Takehisa Yahiro, Katsushi Makino, Haruki Saito, Steven Tottewitz, Boris Habets, Patrick Lomtscher, Jiro Hanaue

Proceedings Volume 11325, 113251Y (2020) https://doi.org/10.1117/12.2551603

KEYWORDS: Distortion, Semiconducting wafers, Optical alignment, Optimization (mathematics), Scanners, Overlay metrology, Process control, Reticles, Data modeling

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