Mr. Henry Fan Profile

Henry Fan

at Yangtze Memory Technologies Co Ltd

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Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper

3D-NAND wafer process monitoring using high voltage SEM with auto e-beam tilt technology

Leeming Tu, Jian Mi, Henry Fan, Haydn Zhou, Felix Xiong, Louis Tu, Gangyi Chen, Chuanyu Shao, Long Zhang, Shinji Kubo

Proceedings Volume 11325, 113250L (2020) https://doi.org/10.1117/12.2551610

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Overlay metrology, Sensors, Signal detection, 3D metrology, Etching, Electron beams, Electron microscopes

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