Jan Willis
Executive Advisor at Calibra Consulting
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 August 2024 Paper
Proceedings Volume 13177, 131770A (2024) https://doi.org/10.1117/12.3031849
KEYWORDS: Extreme ultraviolet, High volume manufacturing, Photomasks, Pellicles, Inspection, Semiconductors, Deep learning, Lithography

Proceedings Article | 29 September 2023 Paper
Proceedings Volume 12915, 129150E (2023) https://doi.org/10.1117/12.2683454
KEYWORDS: Extreme ultraviolet, High volume manufacturing, Photomasks, Inspection, Pellicles, Deep learning, Mask making, Industry, Semiconducting wafers, Manufacturing

Proceedings Article | 16 September 2022 Paper
Proceedings Volume 12325, 123250G (2022) https://doi.org/10.1117/12.2640370
KEYWORDS: Photomasks, Extreme ultraviolet, Inspection, Pellicles, Semiconducting wafers, High volume manufacturing, Wafer inspection, Vestigial sideband modulation, Mask making, Manufacturing

Proceedings Article | 23 August 2021 Paper
Proceedings Volume 11908, 119080C (2021) https://doi.org/10.1117/12.2601110

Proceedings Article | 6 October 2020 Presentation + Paper
Proceedings Volume 11518, 115180E (2020) https://doi.org/10.1117/12.2572811
KEYWORDS: Extreme ultraviolet, Photomask technology, Photomasks

Showing 5 of 11 publications
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