Mr. Jinho Yang Profile

Jinho Yang

at KAIST

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 23 March 2020 Paper

SRAF printing prediction using artificial neural network

Yonghwi Kwon, Jinho Yang, Sungho Kim, Cheolkyun Kim, Youngsoo Shin

Proceedings Volume 11327, 113270C (2020) https://doi.org/10.1117/12.2550685

KEYWORDS: SRAF, Pulmonary function tests, Printing, Machine learning, Optical proximity correction, Photomasks, Artificial neural networks, Data modeling, Logic devices, Lithography

Read Abstract +

Sub-resolution assist features (SRAFs) are inserted in mask layout to improve the manufacturing process window of main patterns. SRAFs should be large enough to maximize their effect, but they are not intended to be printed on photoresist (PR). An accurate method of SRAF printing prediction is important to assure that no SRAFs are actually printed. We apply a machine learning model, specifically artificial neural network (ANN), for fast and accurate SRAF printing check (named ML- SPC). Polar Fourier transform signals and local layout densities are extracted from each SRAF pixel and its surroundings, and are provided to ANN. The area sum of member pixels that are predicted to be printed is used to determine the final printability of SRAF. Training data is carefully sampled so that similar number of printed and non-printed data are used for training; cost function is adjusted in such a way that missing predictions are treated more importantly than false alarms. When ML-SPC is applied to 10nm memory devices, it achieves 11% of false alarms while popular MTA method reports 24%. In addition, ML-SPC is faster than MTA by about 2.7 times.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years