Ms. Juline Saugnier Profile

Juline Saugnier

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Publications (2)

Proceedings Article | 10 April 2024 Poster

Impact of process parameters on grayscale MEEF

Ujwol Palanchoke, Florian Tomaso, Yorrick Exbrayat, Gaby Bélot, Marie-Line Pourteau, Ivanie Mendes, Juline Saugnier, Aurélien Fay, Sébastien Bérard-Bergery, Elodie Sungauer, Charlotte Beylier, Rémi Coquand, Arthur Bernadac

Proceedings Volume PC12956, PC129560Y (2024) https://doi.org/10.1117/12.3010850

KEYWORDS: 3D mask effects, Grayscale lithography, 3D modeling, Data modeling, 3D microstructuring, 3D acquisition, Semiconductors, Profilometers, Process control, Photoresist processing

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Proceedings Article | 1 May 2023 Presentation + Paper

Mask errors impact on grayscale lithography patterning

Ujwol Palanchoke, Gaby Bélot, Sébastien Bérard-Bergery, Juline Saugnier, Elodie Sungauer, Charlotte Beylier, Florian Tomaso, Marie-Line Pourteau, Ivanie Mendes, Rémi Coquand, Arthur Bernadac

Proceedings Volume 12497, 124970N (2023) https://doi.org/10.1117/12.2657600

KEYWORDS: Critical dimension metrology, 3D mask effects, Microlens, Design and modelling, Cadmium, Scanning electron microscopy, Semiconducting wafers, Error analysis, 3D acquisition, Grayscale lithography

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