Anti-reflective (AR) coatings are widely utilized to minimize reflections from optical components. Laser direct writing (LDW) is employed to fabricate complex and multi-level micro-optical elements, such as micro-triplets. Conventional physical vapor deposition methods are insufficient to produce conformal coatings on complex shape and stacked substrates. The atomic layer deposition (ALD) technique offers a promising solution for achieving conformal coatings on free-form components. In this work, we demonstrate the deposition of an AR coating by ALD on LDW-fabricated microstructures and micro-lenses. The ALD-deposited AR coating successfully reduced reflection from 3.3% to 0.1% at 633 nm for one surface of SZ2080.
Multi-photon lithography empowers additive manufacturing of free-form 3D structures. Currently it is being established for production of miniature optical elements including stacked compound components: diffractive, refractive, guiding, filtering, polarizing, and many other optical functions can be merged into monolith devices with super-wavelength and sub-wavelength features. Still such optics are limited to polymers which are low grade in context of optical materials.
We present improvements in their transparency and increasing their laser induced damage threshold (LIDT). This is made by covering the micro-optics with anti-reflective coating employing atomic layer deposition (ALD) method. In contrast to previous reports, the employed material is hybrid organic-inorganic SZ2080TM substance, which be calcinated and turn the objects into glass-ceramics. The transparency after ALD is improved for a single, doublet, and triplet micro-lenses at 633 nm. The calcination increases LIDT for the micro-lenses by several times validated by S-on-1 tests.
The research work opens additive manufacturing of transparent and durable 3D micro-optical components by combining ALD and calcination.
Laser 3D nanolithography enables the fabrication of complex shape micro-optical elements. The freedom of multi-surface designs of such components has cost them to suffer from reflection losses. This work presents the deposition of an Antireflective (AR) coating, using Atomic Layer Deposition (ALD), on hybrid organic-inorganic polymer SZ2080™ microstructures and micro-lenses fabricated using Laser Direct Writing (LDW). The single-wavelength AR coating produced using ALD successfully reduced reflection from 3.3 % to 0.1 % at 633 nm for one surface of SZ2080™.
We report on the 3D printing of high transparency and resiliency free-form micro-optics. The fabrication is realized employing combining femtosecond laser direct write 3D nanolithography (fs-LDW or a.k.a. two-photon polymerization) with high temperature calcination (sintering) and atomic layer deposition (ALD) techniques. The developed approach allows production of diverse single optical elements and stacked components ranging in dimensions from 10 to 100 µm. Produced micro-optic objects are characterized of their optical performance (focusing, imaging, transparency) and determining their laser induced damage threshold (LIDT). This opens novel applications of laser 3D printed microoptics under harsh conditions: radiation, temperature, acidic environment, pressure variations.
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