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Nhu Y. Nguyen
at Nanyang Technological Univ
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Publications (1)
Proceedings Article | 17 July 2015 Paper
Improvement of the pad wear shape in fixed abrasive chemical-mechanical polishing for manufacturing optical components
N. Y. Nguyen, Y. B. Tian, Z. W. Zhong
Proceedings Volume 9524, 95240F (2015) https://doi.org/10.1117/12.2185971
KEYWORDS: Surface finishing, Abrasives, Chemical mechanical planarization, Kinematics, Optics manufacturing, Polishing, Optical components, Aerospace engineering, Chemical analysis, Shape analysis
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