Dr. Robert B. Reichenbach Profile

Dr. Robert B. Reichenbach

at Intel Corp

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Publications (3)

Proceedings Article | 24 January 2004 Paper

Resistively actuated micromechanical dome resonators

Robert Reichenbach, Maxim Zalaludinov, Keith Aubin, David Czaplewski, Bojan Ilic, Brian Houston, Harold Craighead, Jeevak Parpia

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524175

KEYWORDS: Resonators, Domes, Oscillators, Resistors, Signal detection, Microelectromechanical systems, Frequency modulation, Actuators, Fermium, Transceivers

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We demonstrate dome-shaped, radio frequency, micromechanical resonators with integrated thermo-elastic actuators. Such resonators can be used as the frequency-determining element of a local oscillator or as a combination of a mixer and IF filter in a superheterodyne transceiver. The dome resonators (shallow shell segments clamped on the periphery) are fabricated utilizing pre-stressed thin polysilicon film over sacrificial silicon dioxide. The shell geometry enhances the rigidity of the structure, providing a resonant frequency several times higher than a flat membrane of the same dimensions. The finite curvature of the shell also couples out-of-plane deflection with in-plane stress, providing an actuation mechanism. Out-of-plane motion is induced by employing non-homogeneous, thermomechanical stress, generated in plane by local heating. A metal resistor, lithographically defined on the surface of the dome, provides thermal stress by dissipating 4 μW of Joule heat. The diminished heat capacity of the MEMS device enables a heating/cooling rate comparable to the frequency of mechanical resonance and allows operation of the resonator by applying AC current through the microheater. Resistive actuation can be readily incorporated into integrated circuit processing and provides significant advantages over traditional electrostatic actuation, such as low driving voltages, matched 50-ohm impedance, and reduced cross talk between drive and detection. We show that when a superposition of two AC signals is applied to the resistive heater, the driving force can be detected at combinatory frequencies, due to the fact that the driving thermomechanical stress is determined by the square of the heating current. Thus the thermoelastic actuator provides frequency mixing while the resonator itself performs as a high quality (Q~10,000) intermediate frequency filter for the combinatory frequencies. A frequency generator is built by closing a positive feedback loop between the optical detection of the mechanical motion of the dome and the resistive drive. We demonstrate self-sustained oscillation of the dome resonator with frequency stability of 1.5 ppm and discuss the phase noise of the oscillator.

Proceedings Article | 24 April 2003 Paper

Shell-type micromechanical oscillator

Maxim Zalalutdinov, Keith Aubin, Christopher Michael, Robert Reichenbach, Tuncay Alan, Alan Zehnder, Brian Houston, Jeevak Parpia, Harold Craighead

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499107

KEYWORDS: Resonators, Microelectromechanical systems, Oscillators, Modulation, Signal detection, Positive feedback, Phase shifts, Domes, Microresonators, Interferometry

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Proceedings Article | 24 April 2003 Paper

Laser annealing for high-Q MEMS resonators

Keith Aubin, Maxim Zalalutdinov, Robert Reichenbach, Brian Houston, Alan Zehnder, Jeevak Parpia, Harold Craighead

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499109

KEYWORDS: Microelectromechanical systems, Resonators, Annealing, Oscillators, Oxides, Silicon, Laser resonators, Helium neon lasers, Electronics, Etching

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