Recently, the full-area defect inspection of high-performance optical components such as large telescope mirrors is urgently demanded. An industrial robotic arm is suitable for conducting the scanning movement of defect inspection systems, and another monitoring system is needed to guide the moving trajectory of the robotic arm. An efficient and precise guiding system is developed based on a laser projection measuring system. After the calibration of the measuring system, real-time point clouds of the component under test can be acquired. Denoising and registration of the point clouds are conducted to align the robot coordinate system with the workpiece coordinate system. Then, the scanning inspection can be conducted all over the component under test. Experimental results demonstrate that the system has high efficiency and accuracy within 17.59 μm
Stereo deflectometry can specify the position of a workpiece and reduce the difficulty of geometrical calibration. But the measurement scope is limited, and this issue is especially severe for the measurement of complex surfaces. A method is proposed to extend the measuring scope of stereo deflectometry. The nominal model of the surface under test is aligned with the overlapped measurement area of the stereo vision system, and the other areas outside overlapped region are measured using the monoscopic SCOTS approach with each camera, respectively. This method effectively combines the advantages of stereo and monoscopic deflectometry, and the measuring accuracy and flexibility can be improved.
The phase measuring deflectometry is a powerful technique for the in-situ measurement of of complex optics. Its measurement accuracy is comparable with conventional interferometry, but with higher flexibility, stability and efficiency. The three main challenges in the deflectometric measurement, namely the position-angle uncertainty in calculating the pixel correspondences, height-slope ambiguity in specifying the normal vectors, and rank deficiency in surface reconstruction are analyzed. Some significant error factors and effective solutions are introduced. The measuring accuracy of complex surfaces can achieve a level of 100 nm RMS.
Deflectometry is a powerful measuring technique of complex optical surfaces. Usually a series of binary patterns or sinusoidal fringes are displayed on a screen, and correspondences are established between the screen and camera points according to their gray levels or phases. The image associated with a screen pixel is blurred due to the defocus and aberrations of the off-axis imaging system, and the calculated location of the correspondence point will in turn be biased. The space variant point spread function associated with the catadioptric system is analyzed based on the light field method, and the resulting blurring effect is then addressed using Wiener deconvolution algorithm. Henceforth the phase errors in the captured images can be compensated effectively. Experimental results are presented to demonstrate the feasibility and effectiveness of the proposed method.
The dual wavelength interferometry in digital holography can eliminate 2π ambiguities with a large synthetic wavelength, but the measurement error tends to be amplified. In this paper, a new numerical algorithm is proposed to reduce the amplification error, and further expand the measurement range. The wrapped phase map associated with one wavelength is used to assist unwrapping the phase map associated with the other wavelength. Since these two phase maps correspond to the same step height, an exhaustive searching method is applied. The measurement error will not be amplified linearly with the synthetic wavelength, but controlled at the same level with the single wavelength interferometry. In consideration of the measurement errors such as the environmental vibration, instability of wavelength and so on, a tolerance is set to guarantee the stability of the solution. The performance and feasibility of the proposed algorithm is verified by the numerical demonstration.
In the phase measuring deflectometry, the phase error caused by the nonlinear intensity response, called the gamma distortion, can negatively affect the measurement quality of specular surfaces. Based on the generic exponential four-step phase-shifting fringe modal, this paper proposes a flexible and simple phase retrieval method to eliminate the phase errors without complex calibration or additional fringe patterns. The experimental results illustrate that the proposed method can accurately retrieve the phases from the distorted fringe patterns with the Gamma distortion, and the measurement precision can henceforth be improved.
Phase measuring deflectometry is a powerful in-situ measuring technique for complex specular surfaces. Its measuring accuracy depends on the quality of geometric calibration. An in-situ deflectometric measuring system is integrated into a single point diamond turning machine. An accurate self-calibration method is proposed to refine the positions of the camera and the screen. A world coordinate system is established by introducing a flat mirror without markers. The geometric positions are solved by minimizing the deviations of the traced screen pixels. The tracing deviations caused by the form errors behave differently with those caused by the position errors. Precise localization of the measured surface can be realized by error separation, so that detecting of feature points can be avoided. Experimental results demonstrate that the measurement error is below 300 nm.
The measurement of aspheric optics has attracted intensive attention in precision engineering, and efficient in-situ measurement technologies are required urgently. Phase measuring deflectometry is a powerful measuring method for complex specular surfaces. In this paper, an in-situ measurement method is developed based on the sub-aperture deflectometry. A complete measuring procedure is developed, including initial calibration, self-adaptive calibration, route planning, imaging acquisition, phase retrieval, gradient calculation, surface reconstruction and sub-aperture stitching. Several key points concerning the sub-aperture measurement are investigated, and effective solutions are proposed to balance the measuring accuracy and aperture, to overcome the height/slope ambiguity and to eliminate the stitching errors caused by point sampling and measuring errors. The measuring flexibility and stability can be greatly improved compared to the existing SCOTS measuring approach.
In recent years, the measurement of specular aspheric surface has attracted intensive attention in precision engineering. Phase measuring deflectometry is a powerful measuring technique, which could accurately measure specular surfaces. The software configurable optical test system and a four step phase shifting approach are applied to obtain the normal vectors of the measured surface. The geometric parameters are recalculated by optimization to improve the calibration accuracy. Then the surface is reconstructed using a optimization algorithm. The configuration parameters should be set according to specific surface shapes and measuring conditions. Numerical experiments demonstrate that good performance can be achieved using this method.
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