Dr. Shi Li Profile

Dr. Shi Li

at National Institute of Metrology

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Author

Publications (11)

SPIE Journal Paper | 21 June 2022

Integrated optical waveguide atomic force microscopy system with a differential splitter readout

Xinxin Tang, Guofang Fan, Hongru Zhang, Xingang Dai, Yanjun Hu, Shi Li, Zhiping Zhang, Gaoshan Jing, Yuan Li

JNP, Vol. 16, Issue 02, 026012, (June 2022) https://doi.org/10.1117/12.10.1117/1.JNP.16.026012

KEYWORDS: Waveguides, Atomic force microscopy, Integrated optics, Sensors, Refractive index, Light wave propagation, Finite element methods, Silicon, Wave propagation, Signal detection

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Proceedings Article | 13 November 2019 Paper

A multi-pass interferometer for high resolution angular measurement

Wei Li, Sitian Gao, Yushu Shi, Qi Li, Shi Li, Lu Huang

Proceedings Volume 11343, 1134308 (2019) https://doi.org/10.1117/12.2542085

KEYWORDS: Interferometers, Mirrors, Polarization, Beam splitters, Homodyne detection, Prisms

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Proceedings Article | 7 March 2019 Paper

Automatic real-time compensation of wavelength of heterodyne interferometer

Wei Jin, Qi Li, Yushu Shi, Sitian Gao, Wei Li, Shi Li

Proceedings Volume 11053, 110533G (2019) https://doi.org/10.1117/12.2512162

KEYWORDS: Refractive index, Interferometers, Heterodyning, Humidity, Interferometry, Environmental sensing, Mirrors, Fabry–Perot interferometers, Beam splitters, Receivers

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Proceedings Article | 7 March 2019 Paper

Experimental study on non-linear calibration of two-dimensional nano-positioning stage

Zhou Qi, Qi Li, Yu-shu Shi, Shi Li, Lu Huang, Sitian Gao

Proceedings Volume 11053, 1105341 (2019) https://doi.org/10.1117/12.2512394

KEYWORDS: Calibration, Interferometers, Laser systems engineering, Data acquisition, Motion models, Metrology, Nonlinear control, Actuators

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Proceedings Article | 15 November 2017 Paper

Novel dual-probes atomic force microscope for line width measurements

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, Shi Li

Proceedings Volume 10605, 106054G (2017) https://doi.org/10.1117/12.2296489

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Proceedings Article | 5 January 2017 Paper

Analysis method of microstructure surface topography based on wavelet filter

Shu Zhang, Yushu Shi, Sitian Gao, Lei Pi, Qi Li, Wei Li, Zhendong Zhu, Shi Li, Lu Huang, Xin Guo

Proceedings Volume 10244, 102441H (2017) https://doi.org/10.1117/12.2267775

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Proceedings Article | 19 October 2016 Paper

Characterization of Akiyama probe applied to dual-probes atomic force microscope

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, Shi Li, Zhendong Zhu

Proceedings Volume 10155, 101553R (2016) https://doi.org/10.1117/12.2247464

KEYWORDS: Atomic force microscope

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Proceedings Article | 26 January 2016 Paper

The research progress of metrological 248nm deep ultraviolent microscope inspection device

Zhi-xin Wang, Qi Li, Si-tian Gao, Yu-shu Shi, Wei Li, Shi Li

Proceedings Volume 9903, 99030Q (2016) https://doi.org/10.1117/12.2211291

KEYWORDS: Deep ultraviolet, Calibration, Microscopes, Photomasks, Interferometers, Metrology, Optical components, Actuators, Ferroelectric materials, Scanning electron microscopy

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Proceedings Article | 6 March 2015 Paper

Calibration of industrial CT using two forest-balls

Yushu Shi, Xu Song, Shi Li, Wei Li, Qi Li, Siwen Chen, Fei Shen, Xiaoping Song, Sitian Gao

Proceedings Volume 9446, 944637 (2015) https://doi.org/10.1117/12.2181284

KEYWORDS: Calibration, Optical spheres, Printed circuit board testing, Standards development, X-rays, Sensors, Metrology, X-ray computed tomography, X-ray sources, 3D metrology

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Proceedings Article | 13 November 2014 Paper

The assessment of industrial CT's probing error

Yushu Shi, Sitian Gao, Xu Song, Dongsheng Li, Wei Li, Qi Li, Shi Li, Siwen Chen

Proceedings Volume 9276, 92760T (2014) https://doi.org/10.1117/12.2071795

KEYWORDS: Standards development, Optical spheres, Calibration, Printed circuit board testing, Error analysis, Picosecond phenomena, X-rays, Metrology, Sensors, Reconstruction algorithms

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Proceedings Article | 18 September 2014 Paper

Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method

Qi Li, Shi Li, Yushu Shi, Wei Li, Sitian Gao

Proceedings Volume 9282, 92820P (2014) https://doi.org/10.1117/12.2068715

KEYWORDS: Interferometers, Error analysis, Homodyne detection, Polarization, Heterodyning, Interference (communication), Sensors, Calibration, Atomic force microscopy, Signal detection

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Showing 5 of 11 publications

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