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Prof. Steffen Strehle
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 25 May 2022 Presentation + Paper
Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)
Ingo Ortlepp, Jaqueline Stauffenberg, Anja Krötschl, Denis Dontsov, Jens-Peter Zöllner, Steffen Hesse, Christoph Reuter, Steffen Strehle, Thomas Fröhlich, Ivo Rangelow, Eberhard Manske
Proceedings Volume 12054, 120540A (2022) https://doi.org/10.1117/12.2615118
KEYWORDS: Nanofabrication, Control systems, Atomic force microscopy, Optical lithography, Interferometers, Inspection, Scanning probe lithography, Interferometry, System integration
SPIE Journal Paper | 22 December 2021 Open Access
Perspectives of reactive ion etching of silicate glasses for optical microsystems
Christoph Weigel, Ulrike Brokmann, Meike Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger
JOM, Vol. 1, Issue 04, 040901, (December 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.040901
KEYWORDS: Etching, Glasses, Reactive ion etching, Optical microsystems, Plasma, Ions, Silicate glass, Silicon, Crystals, Fluorine
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Proceedings Article | 22 February 2021 Presentation + Paper
Nanopositioning and -fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm
Jaqueline Stauffenberg, Christoph Reuter, Ingo Ortlepp, Mathias Holz, Denis Dontsov, Christoph Schäffel, Jens-Peter Zöllner, Ivo Rangelow, Steffen Strehle, Eberhard Manske
Proceedings Volume 11610, 1161016 (2021) https://doi.org/10.1117/12.2583703
KEYWORDS: Nanofabrication, Wheatstone bridges, Statistical analysis, Sensors, Precision measurement, Optical sensors, Nanotechnology, Nanostructures, Manufacturing, Lithography
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