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Suhyeong Choi
at KAIST
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Publications (4)
Proceedings Article | 30 March 2017 Paper
Machine learning-based 3D resist model
Proceedings Volume 10147, 101471D (2017) https://doi.org/10.1117/12.2257904
KEYWORDS: Metals, Data modeling, Standards development, Resistance, Etching, Machine learning, Photoresist processing, Computer simulations, Artificial neural networks, 3D image processing, Image processing, Lithography, 3D modeling
Proceedings Article | 28 March 2017 Paper
Large marginal 2D self-aligned via patterning for sub-5nm technology
Proceedings Volume 10148, 101480J (2017) https://doi.org/10.1117/12.2257924
KEYWORDS: Etching, Photomasks, Metals, Extreme ultraviolet lithography, Dielectrics, Optical proximity correction, Immersion lithography, Lithography, Source mask optimization, Extreme ultraviolet, Line edge roughness
Proceedings Article | 24 March 2017 Paper
2D self-aligned via patterning strategy with EUV single-exposure in 3nm technology
Proceedings Volume 10143, 1014321 (2017) https://doi.org/10.1117/12.2257923
KEYWORDS: Photomasks, Lithography, Extreme ultraviolet lithography, Source mask optimization, Optical proximity correction, Bridges, Etching, Dielectrics, Metals, Monte Carlo methods
Proceedings Article | 15 March 2016 Paper
Machine learning (ML)-guided OPC using basis functions of polar Fourier transform
Proceedings Volume 9780, 97800H (2016) https://doi.org/10.1117/12.2219073
KEYWORDS: Raster graphics, Bessel functions, Metals
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