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Sven van Haver
at Technische Univ Delft
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Publications (4)
Proceedings Article | 26 November 2012 Paper
Experimental techniques for aberration retrieval with through-focus intensity images
S. Pereira, A. Wiegmann, N. Kumar, A. da Costa Assafrao, A. Polo, L. Wei, S. van Haver
Proceedings Volume 8557, 855706 (2012) https://doi.org/10.1117/12.2000376
KEYWORDS: CCD cameras, Diffraction, Imaging systems, Objectives, Calibration, Digital video discs, Direct methods, Interferometry, Lenses, Collimation
Proceedings Article | 14 May 2010 Paper
Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory
Sven van Haver, Joseph Braat, Silvania Pereira
Proceedings Volume 7717, 77170U (2010) https://doi.org/10.1117/12.854412
KEYWORDS: Microlens, Diffraction, Microlens array, Objectives, CCD cameras, Geometrical optics, Sensors, Cameras, Imaging systems, Point spread functions
Proceedings Article | 7 March 2008 Paper
General imaging of advanced 3D mask objects based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory
Sven van Haver, Olaf Janssen, Joseph Braat, Augustus Janssen, H. Paul Urbach, Silvania Pereira
Proceedings Volume 6924, 69240U (2008) https://doi.org/10.1117/12.771872
KEYWORDS: Photomasks, Lithography, Imaging systems, Diffraction, Reticles, Stereoscopy, 3D image processing, Mask making, Image processing, Algorithms
Proceedings Article | 7 March 2008 Paper
Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm
Olaf Janssen, Sven van Haver, Augustus Janssen, Joseph Braat, H. Paul Urbach, Silvania Pereira
Proceedings Volume 6924, 692410 (2008) https://doi.org/10.1117/12.772497
KEYWORDS: Photomasks, Finite-difference time-domain method, Electromagnetism, Interfaces, Lithography, Near field, Diffraction, Algorithm development, Imaging systems, Free space
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