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Toru Mukumoto
at Miyazaki Univ
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Publications (1)
Proceedings Article | 15 July 2004 Paper
Development of dicing technique for thin semiconductor substrates with femtosecond laser ablation
Atsushi Yokotani, Toru Mukumoto, Toshio Mizuno, Kou Kurosawa, Kosuke Kawahara, Takafumi Ninomiya, Hiroshi Sawada
Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.531677
KEYWORDS: Femtosecond phenomena, Laser ablation, Silicon, Semiconductor lasers, Thermal effects, Cameras, Laser drilling, Laser processing, Pulsed laser operation, Semiconductors
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