Dr. Wenmei Ming
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530T (2022) https://doi.org/10.1117/12.2618035
KEYWORDS: Silicon, Etching, Metrology, Semiconducting wafers, Mid-IR, Diffractive optical elements, Silica, Scattering, Critical dimension metrology, Absorption

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111P (2021) https://doi.org/10.1117/12.2583774
KEYWORDS: Metrology, Machine learning, Signal processing, Semiconductors, Data modeling, Time metrology, Data processing

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