Dr. Young-Seok Woo Profile

Dr. Young-Seok Woo

Senior Engineer at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 24 March 2017 Presentation + Paper

FinFET-induced anisotropy in printing of implantation shapes

Xiren Wang, Yuri Granik, Nikolay Elistratov, Christian Zuniga, Ana-Maria Armeanu, Junghwan Choi, Youngseok Woo

Proceedings Volume 10147, 1014715 (2017) https://doi.org/10.1117/12.2258346

KEYWORDS: Optical proximity correction, Critical dimension metrology, Anisotropy, Printing, Finite-difference time-domain method, Field effect transistors, Lithographic illumination, Computational lithography, Image processing, Process control, Semiconducting wafers, Reflection, 3D modeling, Silicon, Cadmium, Solids

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Proceedings Article | 4 March 2010 Paper

Optical proximity correction enhancement by using model based fragmentation approaches

Young-Seok Woo, Woon-Hyuk Choi, Beom-Seok Seo, Yoo-Hyon Kim, Vladislav Liubich, Shady Abdelwahed, Juhwan Kim, James Word, Jong-Won Lee

Proceedings Volume 7640, 76401F (2010) https://doi.org/10.1117/12.848447

KEYWORDS: Optical proximity correction, Lithography, Optical lithography, Critical dimension metrology, Bridges, Resolution enhancement technologies, Semiconducting wafers, Lithographic illumination, Tolerancing, Computer simulations

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