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Yujiao Li
at ITMO Univ.
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Publications (1)
Proceedings Article | 27 November 2024 Poster + Paper
Simulation and analysis of multilayer film for EUV lithography
Haoyu Wang, Shan Gao, Yujiao Li, Lyudmila Gubanova, Elena Tsyganok
Proceedings Volume 13237, 132371G (2024) https://doi.org/10.1117/12.3036153
KEYWORDS: Reflectivity, Film thickness, Multilayers, Extreme ultraviolet lithography, Reflection, Thin films, Materials properties
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